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Piezoelectric Microelectromechanical Systems
A piezoelectric microelectromechanical system (piezoMEMS) is a miniature or microscopic device that uses piezoelectricity to generate motion and carry out its tasks. It is a microelectromechanical system that takes advantage of an electrical potential that appears under mechanical stress. PiezoMEMS can be found in a variety of applications, such as switches, inkjet printer heads, sensors, micropumps, and energy harvesters. Development Interest in piezoMEMS technology began around the early 1990s as scientists explored alternatives to electrostatic actuation in radio frequency (RF) microelectromechanical systems (MEMS). For RF MEMS, electrostatic actuation specialized high voltage charge pump circuits due to small electrode gap spacing and large driving voltages. In contrast, piezoelectric actuation allowed for high sensitivity as well as low voltage and power consumption as low as a few millivolts. It also had the ability to close large vertical gaps while still allowing for ...
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Piezoelectricity
Piezoelectricity (, ) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word ''piezoelectricity'' means electricity resulting from pressure and latent heat. It is derived from the Greek word ; ''piezein'', which means to squeeze or press, and ''ēlektron'', which means amber, an ancient source of electric charge. The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry. The piezoelectric effect is a reversible process: materials exhibiting the piezoelectric effect also exhibit the reverse piezoelectric effect, the internal generation of a mechanical strain resulting from an applied electrical field. For example, lead zirconate titanate crystals will generate measurable piezoelectricity when ...
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Resonator
A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either generate waves of specific frequencies or to select specific frequencies from a signal. Musical instruments use acoustic resonators that produce sound waves of specific tones. Another example is quartz crystals used in electronic devices such as radio transmitters and quartz watches to produce oscillations of very precise frequency. A cavity resonator is one in which waves exist in a hollow space inside the device. In electronics and radio, microwave cavities consisting of hollow metal boxes are used in microwave transmitters, receivers and test equipment to control frequency, in place of the tuned circuits which are used at lowe ...
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Electrical Engineering
Electrical engineering is an engineering discipline concerned with the study, design, and application of equipment, devices, and systems which use electricity, electronics, and electromagnetism. It emerged as an identifiable occupation in the latter half of the 19th century after commercialization of the electric telegraph, the telephone, and electrical power generation, distribution, and use. Electrical engineering is now divided into a wide range of different fields, including computer engineering, systems engineering, power engineering, telecommunications, radio-frequency engineering, signal processing, instrumentation, photovoltaic cells, electronics, and optics and photonics. Many of these disciplines overlap with other engineering branches, spanning a huge number of specializations including hardware engineering, power electronics, electromagnetics and waves, microwave engineering, nanotechnology, electrochemistry, renewable energies, mechatronics/control, and electrical m ...
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Mechanical Engineering
Mechanical engineering is the study of physical machines that may involve force and movement. It is an engineering branch that combines engineering physics and mathematics principles with materials science, to design, analyze, manufacture, and maintain mechanical systems. It is one of the oldest and broadest of the engineering branches. Mechanical engineering requires an understanding of core areas including mechanics, dynamics, thermodynamics, materials science, structural analysis, and electricity. In addition to these core principles, mechanical engineers use tools such as computer-aided design (CAD), computer-aided manufacturing (CAM), and product lifecycle management to design and analyze manufacturing plants, industrial equipment and machinery, heating and cooling systems, transport systems, aircraft, watercraft, robotics, medical devices, weapons, and others. Mechanical engineering emerged as a field during the Industrial Revolution in Europe in the 18 ...
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Nucleation
In thermodynamics, nucleation is the first step in the formation of either a new thermodynamic phase or structure via self-assembly or self-organization within a substance or mixture. Nucleation is typically defined to be the process that determines how long an observer has to wait before the new phase or self-organized structure appears. For example, if a volume of water is cooled (at atmospheric pressure) below 0°C, it will tend to freeze into ice, but volumes of water cooled only a few degrees below 0°C often stay completely free of ice for long periods (supercooling). At these conditions, nucleation of ice is either slow or does not occur at all. However, at lower temperatures nucleation is fast, and ice crystals appear after little or no delay. Nucleation is a common mechanism which generates first-order phase transitions, and it is the start of the process of forming a new thermodynamic phase. In contrast, new phases at continuous phase transitions start to form im ...
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Perovskite (structure)
A perovskite is any material with a crystal structure following the formula ABX3, which was first discovered as the Perovskite, mineral called perovskite, which consists of calcium titanium oxide (CaTiO3). The mineral was first discovered in the Ural Mountains, Ural mountains of Russia by Gustav Rose in 1839 and named after Russian mineralogist L. A. Perovski (1792–1856). 'A' and 'B' are two positively charged ions (i.e. cations), often of very different sizes, and X is a negatively charged ion (an anion, frequently oxide) that bonds to both cations. The 'A' atoms are generally larger than the 'B' atoms. The ideal Cubic crystal system, cubic structure has the B cation in 6-fold coordination, surrounded by an octahedron of anions, and the A cation in 12-fold cuboctahedron, cuboctahedral coordination. Additional perovskite forms may exist where either/both the A and B sites have a configuration of A1x-1A2x and/or B1y-1B2y and the X may deviate from the ideal coordination configu ...
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Wurtzite Crystal Structure
In crystallography, the hexagonal crystal family is one of the six crystal families, which includes two crystal systems (hexagonal and trigonal) and two lattice systems (hexagonal and rhombohedral). While commonly confused, the trigonal crystal system and the rhombohedral lattice system are not equivalent (see section crystal systems below). In particular, there are crystals that have trigonal symmetry but belong to the hexagonal lattice (such as α-quartz). The hexagonal crystal family consists of the 12 point groups such that at least one of their space groups has the hexagonal lattice as underlying lattice, and is the union of the hexagonal crystal system and the trigonal crystal system. There are 52 space groups associated with it, which are exactly those whose Bravais lattice is either hexagonal or rhombohedral. __TOC__ Lattice systems The hexagonal crystal family consists of two lattice systems: hexagonal and rhombohedral. Each lattice system consists of one Bravais l ...
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Polycrystalline
A crystallite is a small or even microscopic crystal which forms, for example, during the cooling of many materials. Crystallites are also referred to as grains. Bacillite is a type of crystallite. It is rodlike with parallel longulites. Structure The orientation of crystallites can be random with no preferred direction, called random texture, or directed, possibly due to growth and processing conditions. While the structure of a ( single) crystal is highly ordered and its lattice is continuous and unbroken, amorphous materials, such as glass and many polymers, are non-crystalline and do not display any structures, as their constituents are not arranged in an ordered manner. Polycrystalline structures and paracrystalline phases are in-between these two extremes. Polycrystalline materials, or polycrystals, are solids that are composed of many crystallites of varying size and orientation. Most materials are polycrystalline, made of a large number crystallites held together by ...
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Bulk Micromachining
Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate. Whereas surface micromachining creates structures ''on top'' of a substrate, bulk micromachining produces structures ''inside'' a substrate. Usually, silicon wafers are used as substrates for bulk micromachining, as they can be anisotropically wet etched, forming highly regular structures. Wet etching typically uses alkaline liquid solvents, such as potassium hydroxide (KOH) or tetramethylammonium hydroxide (TMAH) to dissolve silicon which has been left exposed by the photolithography masking step. These alkali solvents dissolve the silicon in a highly anisotropic way, with some crystallographic orientations dissolving up to 1000 times faster than others. Such an approach is often used with ...
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Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic table: carbon is above it; and germanium, tin, lead, and flerovium are below it. It is relatively unreactive. Because of its high chemical affinity for oxygen, it was not until 1823 that Jöns Jakob Berzelius was first able to prepare it and characterize it in pure form. Its oxides form a family of anions known as silicates. Its melting and boiling points of 1414 °C and 3265 °C, respectively, are the second highest among all the metalloids and nonmetals, being surpassed only by boron. Silicon is the eighth most common element in the universe by mass, but very rarely occurs as the pure element in the Earth's crust. It is widely distributed in space in cosmic dusts, planetoids, and planets as various forms of silicon ...
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Iridium(IV) Oxide
Iridium(IV) oxide, IrO2, is the only well-characterised oxide of iridium. It is a blue-black solid. The compound adopts the TiO2 rutile structure, featuring six coordinate iridium and three coordinate oxygen. It is used with other rare oxides in the coating of anode-electrodes for industrial electrolysis and in microelectrodes for electrophysiology research. As described by its discoverers, it can be formed by treating the green form of iridium trichloride Iridium(III) chloride is the inorganic compound with the formula IrCl3. The anhydrous compound is relatively rare, but the related hydrate is useful for preparing other iridium compounds. The anhydrous salt is a dark green crystalline solid. Mo ... with oxygen at high temperatures: :2 IrCl3 + 2 O2 → 2 IrO2 + 3 Cl2 A hydrated form is also known. Application Iridium dioxide can be used as an anode electrode for industrial electrolysis and as a microelectrode for electrophysiological studies. Iridium dioxide can b ...
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Electromechanics
In engineering, electromechanics combines processes and procedures drawn from electrical engineering and mechanical engineering. Electromechanics focuses on the interaction of electrical and mechanical systems as a whole and how the two systems interact with each other. This process is especially prominent in systems such as those of DC or AC rotating electrical machines which can be designed and operated to generate power from a mechanical process ( generator) or used to power a mechanical effect ( motor). Electrical engineering in this context also encompasses electronics engineering. Electromechanical devices are ones which have both electrical and mechanical processes. Strictly speaking, a manually operated switch is an electromechanical component due to the mechanical movement causing an electrical output. Though this is true, the term is usually understood to refer to devices which involve an electrical signal to create mechanical movement, or vice versa mechanical moveme ...
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