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Double Patterning
Multiple patterning (or multi-patterning) is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density. It is expected to be necessary for the 10 nm and 7 nm node semiconductor processes and beyond. The premise is that a single lithographic exposure may not be enough to provide sufficient resolution. Hence additional exposures would be needed, or else positioning patterns using etched feature sidewalls (using spacers) would be necessary. Even with single exposure having sufficient resolution, extra masks have been implemented for better patterning quality such as by Intel for line-cutting at its 45nm node or TSMC at its 28nm node. Even for electron-beam lithography, single exposure appears insufficient at ~10 nm half-pitch, hence requiring double patterning. Double patterning lithography was first demonstrated in 1983 by D. C. Flanders and N. N. Efremow. Since then several double patterning te ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Photolithography
Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer. The process begins with a photosensitive material, called a photoresist, being applied to the substrate. A photomask that contains the desired pattern is then placed over the photoresist. Light is shone through the photomask, exposing the photoresist in certain areas. The exposed areas undergo a chemical change, making them either soluble or insoluble in a developer solution. After development, the pattern is transferred onto the substrate through etching, chemical vapor deposition, or ion implantation processes. Ultraviolet, Ultraviolet (UV) light is typically used. Photolithography processes can be classified according to the type of light used, including ultraviolet lithography, deep ultraviolet lithography, extreme ultraviolet lithography, extreme ultraviolet lithography ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Different Orientation Illuminations
Different may refer to: Music * "Different", a song by Cass Elliot from the soundtrack of the 1970 film '' Pufnstuf'' * '' Different'', a 1989 album by Thomas Anders * '' Different'', a 2002 album by Kate Ryan * "Different", a song by Egypt Central from their eponymous 2005 album * "Different", a song by Acceptance from the 2005 album '' Phantoms'' * "Different", a 2006 song by Jamie Shaw * "Different", a song by Dreamscape from the 2007 album '' 5th Season'' * "Different", a song by Pendulum from the 2008 album ''In Silico'' * "Different", a song by Ximena Sariñana from the 2011 album Ximena Sariñana * " Different", a 2012 song by Robbie Williams * "Different", a song by No Malice from the 2013 album '' Hear Ye Him'' * "Different", a song by Winner from the 2014 album ''2014 S/S'' * "Different", a 2017 song by Micah Tyler * "Different", a song by Future and Juice Wrld from the 2018 mixtape ''Wrld on Drugs'' * "Different", a song by Burna Boy from the 2019 album ''African Gian ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Hardmask
A hardmask is a material used in semiconductor processing as an etch mask instead of a polymer or other organic "soft" resist material. Hardmasks are necessary when the material being etched is itself an organic polymer. Anything used to etch this material will also etch the photoresist being used to define its patterning since that is also an organic polymer. This arises, for instance, in the patterning of low-κ dielectric insulation layers used in VLSI fabrication. Polymers tend to be etched easily by oxygen, fluorine, chlorine and other reactive gases used in plasma etching. Use of a hardmask involves an additional deposition process, and hence additional cost. First, the hardmask material is deposited and etched into the required pattern using a standard photoresist process. Following that the underlying material can be etched through the hardmask. Finally the hardmask is removed with a further etching process. Hardmask materials can be metal or dielectric. Silicon ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Spacer Patterning
A spacer can refer to something used to separate two parts in an assembly. Spacer can also refer to: Arts and entertainment * ''Spacer'' (album), a 2011 album by Jason Adasiewicz * "Spacer", a song by Sheila and B. Devotion from the 1980 album '' King of the World'' * "Spacer", a 1938 short story by Sydor Rey * Spacers, a fictional sociocultural group in Isaac Asimov's ''Robot'' series of novels and short stories Science and technology Biology and medicine * Asthma spacer, medical equipment * Orthodontic spacer * Spacer DNA, in genetics * Spacer in joint replacement Other uses in science and technology * Spacer, an element in HTML web design * Spacers and standoffs, unthreaded pieces of rigid tubing, often used in electronic equipment * Rebar spacer, in concrete construction Oil and gas industry * Spacer, a viscous fluid used to remove drilling fluids ahead of cement slurry. The spacer is made up with specific fluid attributes, such as viscosity and density that are des ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Stitch Double Patterning
Stitch, Stitches, Stitching or Stitched may refer to: Medical uses *Stitch, a surgical suture, a medical device used to hold body tissues together after an injury or surgery **Cervical cerclage, also known as a cervical stitch * Husband stitch, a purported historical surgical procedure *Seton stitch, a procedure used to aid the healing of fistulae * Side stitch, an intense stabbing pain during exercise *Stitch method, a minimally invasive procedure for pinning protruding ears Textile arts *Stitch (textile arts), a single loop of thread or yarn ** List of knitting stitches **List of sewing stitches People * Stitches (rapper), Phillip Nickolas Katsabanis (born 1995), American rapper * Jacob Duran, known as Stitch, a boxing cutman Arts, entertainment, and media Fictional characters * Stitch (''Lilo & Stitch''), the title alien from Disney's ''Lilo & Stitch'' franchise * Stitch, a fictional mutant in ''Alpha Flight'' comics * Stitch (DC Comics), a fictional character from DC Comi ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
EUV Triple Patterning Vs DUV Quadruple Patterning
Extreme ultraviolet radiation (EUV or XUV) or high-energy ultraviolet radiation is electromagnetic radiation in the part of the electromagnetic spectrum spanning wavelengths shorter than the hydrogen Lyman-alpha line from 121 nm down to the X-ray band of 10 nm. By the Planck–Einstein equation the EUV photons have energies from 10.26 eV up to 124.24 eV where we enter the X-ray energies. EUV is naturally generated by the solar corona and artificially by plasma, high harmonic generation sources and synchrotron light sources. Since UVC extends to 100 nm, there is some overlap in the terms. The main uses of extreme ultraviolet radiation are photoelectron spectroscopy, solar imaging, and lithography. In air, EUV is the most highly absorbed component of the electromagnetic spectrum, requiring high vacuum for transmission. EUV generation Neutral atoms or condensed matter do not have large enough energy transitions to emit EUV radiation. Ionization m ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Pitch Splitting
Pitch may refer to: Acoustic frequency * Pitch (music), the perceived frequency of sound including "definite pitch" and "indefinite pitch" ** Absolute pitch or "perfect pitch" ** Pitch class, a set of all pitches that are a whole number of octaves apart ** Relative pitch, the ability to identify a given musical interval between two notes * Pitch accent, a form of accentuation in speech Business * Sales pitch, a line of talk that attempts to persuade someone or something ** Pitch (filmmaking), a proposal for a film ** Elevator pitch, a very short sales presentation, allegedly short enough to be made during an elevator ride Measurement Movement about the transverse axis * Pitch angle (or pitch rotation), one of the angular degrees of freedom of any stiff body (for example a vehicle), describing rotation about the side-to-side axis ** Pitch (aviation), one of the aircraft principal axes of rotation (nose-up or nose-down angle measured from horizontal axis) ** Pitch (ship motion) ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Trench Doubling
A trench is a type of excavation or depression in the ground that is generally deeper than it is wide (as opposed to a swale or a bar ditch), and narrow compared with its length (as opposed to a simple hole or pit). In geology, trenches result from erosion by rivers or by geological movement of tectonic plates. In civil engineering, trenches are often created to install underground utilities such as gas, water, power and communication lines. In construction, trenches are dug for foundations of buildings, retaining walls and dams, and for cut-and-cover construction of tunnels. In archaeology, the "trench method" is used for searching and excavating ancient ruins or to dig into strata of sedimented material. In geotechnical engineering, trench investigations locate faults and investigate deep soil properties. In trench warfare, soldiers occupy trenches to protect them against weapons fire and artillery. Trenches are dug using manual tools such as shovel and pickaxe or heavy ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Cut Overlay Issues
Cut or CUT may refer to: Common uses * The act of cutting, the separation of an object into two through acutely directed force ** A type of wound ** Cut (archaeology), a hole dug in the past ** Cut (clothing), the style or shape of a garment ** Cut (earthworks), an excavation to make way for a transport route ** Cut (gems) ** Cut of meat * Cut (etiquette), a snub or slight such as failure to greet an acquaintance Geography Romania * Cut, Alba, a commune * Cut, a village in Dumbrava Roșie United States * Cut, Texas, an unincorporated community * Cut River (Mackinac County, Michigan) * Cut River (Roscommon County, Michigan) * Custer County Airport, South Dakota, US (FAA identifier CUT) Computing and mathematics * Cut (logic programming) * cut (Unix), a command line utility * Cut, copy, and paste, a set of editing procedures * Control Unit Terminal, a kind of IBM display terminal for mainframe computers * Cut (graph theory) Books * ''Cut'' (manga), a 2008 Japanese manga ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Illuminations For Multipitch Pattern
Illuminations may refer to: Shows and festivals * IllumiNations: Reflections of Earth, a nightly fireworks show currently at Epcot at Walt Disney World Resort *'' IllumiNations'', original nightly firework show at Epcot at Walt Disney World Resort before Reflections of Earth was created * Illuminations (festival), a secular autumn festival of electric lights held in several English cities **Blackpool Illuminations, an annual lights festival in the British seaside resort of Blackpool * Disney Illuminations, a nightly firework show at Disneyland Paris Music and video * ''Illuminations'' (Alice Coltrane and Carlos Santana album) or the title song, 1974 * ''Illuminations'' (Buffy Sainte-Marie album), 1969 * ''Illuminations'' (Erik Friedlander album), 2015 * ''Illuminations'' (Josh Groban album), 2010 * ''Illuminations'' (McCoy Tyner album) or the title song, 2004 * ''Illuminations'' (Wishbone Ash album), 1996 * ''Illuminations'' (EP), by Little Boots, 2009 * ''Illuminations'' (video), ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
SRAF OPC Hotspot
The Rhodesian Air Force (RhAF) was an air force based in Salisbury (now Harare) which represented several entities under various names between 1935 and 1980: originally serving the British self-governing colony of Southern Rhodesia, it was the air arm of the Federation of Rhodesia and Nyasaland between 1953 and 31 December 1963; of Southern Rhodesia once again from 1 January 1964; and of the unrecognised nation of Rhodesia following its Unilateral Declaration of Independence from Britain on 11 November 1965. Named the Royal Rhodesian Air Force (RRAF) from 1954, the "Royal" prefix was dropped in 1970 when Rhodesia declared itself a republic – the official abbreviation changed appropriately. When the internationally recognised country of Zimbabwe came into being in 1980, the RhAF became the Air Force of Zimbabwe. History Formed in 1935 under the name Southern Rhodesia Staff Corps Air Unit as a territorial unit, the first regular servicemen with the unit went to Britain for ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
