EUV Triple Patterning Vs DUV Quadruple Patterning
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EUV Triple Patterning Vs DUV Quadruple Patterning
Extreme ultraviolet radiation (EUV or XUV) or high-energy ultraviolet radiation is electromagnetic radiation in the part of the electromagnetic spectrum spanning wavelengths shorter than the hydrogen Lyman-alpha line from 121  nm down to the X-ray band of 10 nm. By the Planck–Einstein equation the EUV photons have energies from 10.26  eV up to 124.24 eV where we enter the X-ray energies. EUV is naturally generated by the solar corona and artificially by plasma, high harmonic generation sources and synchrotron light sources. Since UVC extends to 100 nm, there is some overlap in the terms. The main uses of extreme ultraviolet radiation are photoelectron spectroscopy, solar imaging, and lithography. In air, EUV is the most highly absorbed component of the electromagnetic spectrum, requiring high vacuum for transmission. EUV generation Neutral atoms or condensed matter do not have large enough energy transitions to emit EUV radiation. Ionization m ...
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Sun - August 1, 2010
The Sun is the star at the centre of the Solar System. It is a massive, nearly perfect sphere of hot Plasma (physics), plasma, heated to incandescence by nuclear fusion reactions in its core, radiating the energy from its surface mainly as visible light and infrared radiation with 10% at ultraviolet energies. It is by far the most important source of energy for life on Earth. The Sun has been an The Sun in culture, object of veneration in many cultures. It has been a central subject for astronomical research since Ancient history, antiquity. The Sun orbits the Galactic Center at a distance of 24,000 to 28,000 light-years. Its distance from Earth defines the astronomical unit, which is about or about 8 light-minutes. Solar radius, Its diameter is about (), 109 times that of Earth. solar mass, The Sun's mass is about 330,000 times that of Earth, making up about 99.86% of the total mass of the Solar System. The mass of outer layer of the Sun's atmosphere, its ''photosphere'' ...
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Photoelectron Spectroscopy
Photoemission spectroscopy (PES), also known as photoelectron spectroscopy, refers to energy measurement of electrons emitted from solids, gases or liquids by the photoelectric effect, in order to determine the binding energies of electrons in the substance. The term refers to various techniques, depending on whether the ionization energy is provided by X-ray, EUV or UV photons. Regardless of the incident photon beam, however, all photoelectron spectroscopy revolves around the general theme of surface analysis by measuring the ejected electrons. Types X-ray photoelectron spectroscopy (XPS) was developed by Kai Siegbahn starting in 1957 and is used to study the energy levels of atomic core electrons, primarily in solids. Siegbahn referred to the technique as "electron spectroscopy for chemical analysis" (ESCA), since the core levels have small chemical shifts depending on the chemical environment of the atom that is ionized, allowing chemical structure to be determined. Siegba ...
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Harmonic
In physics, acoustics, and telecommunications, a harmonic is a sinusoidal wave with a frequency that is a positive integer multiple of the ''fundamental frequency'' of a periodic signal. The fundamental frequency is also called the ''1st harmonic''; the other harmonics are known as ''higher harmonics''. As all harmonics are periodic at the fundamental frequency, the sum of harmonics is also periodic at that frequency. The set of harmonics forms a '' harmonic series''. The term is employed in various disciplines, including music, physics, acoustics, electronic power transmission, radio technology, and other fields. For example, if the fundamental frequency is 50  Hz, a common AC power supply frequency, the frequencies of the first three higher harmonics are 100 Hz (2nd harmonic), 150 Hz (3rd harmonic), 200 Hz (4th harmonic) and any addition of waves with these frequencies is periodic at 50 Hz. In music, harmonics are used on string instruments and ...
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Ionizing Radiation
Ionizing (ionising) radiation, including Radioactive decay, nuclear radiation, consists of subatomic particles or electromagnetic waves that have enough energy per individual photon or particle to ionization, ionize atoms or molecules by detaching electrons from them. Some particles can travel up to 99% of the speed of light, and the electromagnetic waves are on the high-energy portion of the electromagnetic spectrum. Gamma rays, X-rays, and the higher energy vacuum ultraviolet, ultraviolet part of the electromagnetic spectrum are ionizing radiation; whereas the lower energy ultraviolet, visible light, infrared, microwaves, and radio waves are non-ionizing radiation. Nearly all types of laser light are non-ionizing radiation. The boundary between ionizing and non-ionizing radiation in the ultraviolet area cannot be sharply defined, as different molecules and atoms ionize at Ionization energies of the elements (data page), different energies. The energy of ionizing radiation starts ...
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Harmonic Generation
Harmonic generation (HG, also called multiple harmonic generation) is a nonlinear optical process in which n photons with the same frequency interact with a nonlinear material, are "combined", and generate a new photon with n times the energy of the initial photons (equivalently, n times the frequency and the wavelength divided by n). General process In a medium having a substantial nonlinear susceptibility, harmonic generation is possible. Note that for even orders (n = 2,4,\dots), the medium must have no center of symmetry (non-centrosymmetrical). Because the process requires that many photons are present at the same time and at the same place, the generation process has a low probability to occur, and this probability decreases with the order n. To generate efficiently, the symmetry of the medium must allow the signal to be amplified (through phase matching, for instance), and the light source must be intense and well-controlled spatially (with a collimated laser) and tempora ...
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Electric Field
An electric field (sometimes called E-field) is a field (physics), physical field that surrounds electrically charged particles such as electrons. In classical electromagnetism, the electric field of a single charge (or group of charges) describes their capacity to exert attractive or repulsive forces on another charged object. Charged particles exert attractive forces on each other when the sign of their charges are opposite, one being positive while the other is negative, and repel each other when the signs of the charges are the same. Because these forces are exerted mutually, two charges must be present for the forces to take place. These forces are described by Coulomb's law, which says that the greater the magnitude of the charges, the greater the force, and the greater the distance between them, the weaker the force. Informally, the greater the charge of an object, the stronger its electric field. Similarly, an electric field is stronger nearer charged objects and weaker f ...
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Valence Electrons
In chemistry and physics, valence electrons are electrons in the outermost shell of an atom, and that can participate in the formation of a chemical bond if the outermost shell is not closed. In a single covalent bond, a shared pair forms with both atoms in the bond each contributing one valence electron. The presence of valence electrons can determine the element's chemical properties, such as its valence—whether it may bond with other elements and, if so, how readily and with how many. In this way, a given element's reactivity is highly dependent upon its electronic configuration. For a main-group element, a valence electron can exist only in the outermost electron shell; for a transition metal, a valence electron can also be in an inner shell. An atom with a closed shell of valence electrons (corresponding to a noble gas configuration) tends to be chemically inert. Atoms with one or two valence electrons more than a closed shell are highly reactive due to the relativel ...
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Electronvolt
In physics, an electronvolt (symbol eV), also written electron-volt and electron volt, is the measure of an amount of kinetic energy gained by a single electron accelerating through an Voltage, electric potential difference of one volt in vacuum. When used as a Units of energy, unit of energy, the numerical value of 1 eV in joules (symbol J) is equal to the numerical value of the Electric charge, charge of an electron in coulombs (symbol C). Under the 2019 revision of the SI, this sets 1 eV equal to the exact value Historically, the electronvolt was devised as a standard unit of measure through its usefulness in Particle accelerator#Electrostatic particle accelerators, electrostatic particle accelerator sciences, because a particle with electric charge ''q'' gains an energy after passing through a voltage of ''V''. Definition and use An electronvolt is the amount of energy gained or lost by a single electron when it moves through an Voltage, electric potential differenc ...
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Ionization
Ionization or ionisation is the process by which an atom or a molecule acquires a negative or positive Electric charge, charge by gaining or losing electrons, often in conjunction with other chemical changes. The resulting electrically charged atom or molecule is called an ion. Ionization can result from the loss of an electron after collisions with subatomic particles, collisions with other atoms, molecules, electrons, positrons, protons, antiprotons, and ions, or through the interaction with electromagnetic radiation. Heterolytic bond cleavage and heterolytic substitution reactions can result in the formation of ion pairs. Ionization can occur through radioactive decay by the internal conversion process, in which an excited nucleus transfers its energy to one of the inner-shell electrons causing it to be ejected. Uses Everyday examples of gas ionization occur within a fluorescent lamp or other electrical discharge lamps. It is also used in radiation detectors such as the Geiger- ...
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Atomic Electron Transition
In atomic physics and chemistry, an atomic electron transition (also called an atomic transition, quantum jump, or quantum leap) is an electron changing from one energy level to another within an atom or artificial atom. The time scale of a quantum jump has not been measured experimentally. However, the Franck–Condon principle binds the upper limit of this parameter to the order of attoseconds. Electrons can ''relax'' into states of lower energy by emitting electromagnetic radiation in the form of a photon. Electrons can also absorb passing photons, which ''excites'' the electron into a state of higher energy. The larger the energy separation between the electron's initial and final state, the shorter the photons' wavelength. History Danish physicist Niels Bohr first theorized that electrons can perform quantum jumps in 1913. Soon after, James Franck and Gustav Ludwig Hertz proved experimentally that atoms have quantized energy states. The observability of quantum jum ...
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Condensed Matter Physics
Condensed matter physics is the field of physics that deals with the macroscopic and microscopic physical properties of matter, especially the solid and liquid State of matter, phases, that arise from electromagnetic forces between atoms and electrons. More generally, the subject deals with condensed phases of matter: systems of many constituents with strong interactions among them. More exotic condensed phases include the superconductivity, superconducting phase exhibited by certain materials at extremely low cryogenic temperatures, the ferromagnetic and antiferromagnetic phases of Spin (physics), spins on crystal lattices of atoms, the Bose–Einstein condensates found in ultracold atomic systems, and liquid crystals. Condensed matter physicists seek to understand the behavior of these phases by experiments to measure various material properties, and by applying the physical laws of quantum mechanics, electromagnetism, statistical mechanics, and other theoretical physics, physic ...
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Vacuum
A vacuum (: vacuums or vacua) is space devoid of matter. The word is derived from the Latin adjective (neuter ) meaning "vacant" or "void". An approximation to such vacuum is a region with a gaseous pressure much less than atmospheric pressure. Physicists often discuss ideal test results that would occur in a ''perfect'' vacuum, which they sometimes simply call "vacuum" or free space, and use the term partial vacuum to refer to an actual imperfect vacuum as one might have in a laboratory or in space. In engineering and applied physics on the other hand, vacuum refers to any space in which the pressure is considerably lower than atmospheric pressure. The Latin term ''in vacuo'' is used to describe an object that is surrounded by a vacuum. The ''quality'' of a partial vacuum refers to how closely it approaches a perfect vacuum. Other things equal, lower gas pressure means higher-quality vacuum. For example, a typical vacuum cleaner produces enough suction to reduce air pressur ...
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