Diffusion pumps use a high speed jet of vapor to direct gas

molecule A molecule is a group of two or more atoms that are held together by Force, attractive forces known as chemical bonds; depending on context, the term may or may not include ions that satisfy this criterion. In quantum physics, organic chemi ...

s in the pump throat down into the bottom of the pump and out the exhaust. They were the first type of high

vacuum pump A vacuum pump is a type of pump device that draws gas particles from a sealed volume in order to leave behind a partial vacuum. The first vacuum pump was invented in 1650 by Otto von Guericke, and was preceded by the suction pump, which dates to ...

s operating in the regime of

free molecular flow Free molecular flow describes the fluid dynamics of gas where the mean free path of the molecules is larger than the size of the chamber or of the object under test. For tubes/objects of the size of several cm, this means pressures well below 10− ...

, where the movement of the gas molecules can be better understood as

diffusion Diffusion is the net movement of anything (for example, atoms, ions, molecules, energy) generally from a region of higher concentration to a region of lower concentration. Diffusion is driven by a gradient in Gibbs free energy or chemical p ...

than by conventional

fluid dynamics In physics, physical chemistry and engineering, fluid dynamics is a subdiscipline of fluid mechanics that describes the flow of fluids – liquids and gases. It has several subdisciplines, including (the study of air and other gases in motion ...

. Invented in 1915 by Wolfgang Gaede, he named it a ''diffusion pump'' since his design was based on the finding that gas cannot diffuse against the vapor stream, but will be carried with it to the exhaust. However, the principle of operation might be more precisely described as gas-jet pump, since diffusion also plays a role in other types of high vacuum pumps. In modern textbooks, the diffusion pump is categorized as a

momentum transfer In particle physics, wave mechanics, and optics, momentum transfer is the amount of momentum that one particle gives to another particle. It is also called the scattering vector as it describes the transfer of wavevector in wave mechanics. In ...

pump. The diffusion pump is widely used in both industrial and research applications. Most modern diffusion pumps use

silicone oil A silicone oil is any liquid polymerized siloxane with organic side chains. The most important member is polydimethylsiloxane. These polymers are of commercial interest because of their relatively high thermal stability and their lubricating prop ...

polyphenyl ether Phenyl ether polymers are a class of polymers that contain a phenoxy or a thiophenoxy group as the repeating group in ether linkages. Commercial phenyl ether polymers belong to two chemical classes: polyphenyl ethers (PPEs) and polyphenylene ...

s as the working fluid.

History

In the late 19th century, most vacuums were created using a

Sprengel pump The Sprengel pump is a vacuum pump that uses drops of mercury falling through a small-bore capillary tube to trap air from the system to be evacuated. It was invented by Hanover-born chemist Hermann Sprengel in 1865 while he was working in Lo ...

, which had the advantage of being very simple to operate, and capable of achieving quite good vacuum given enough time. Compared to later pumps, however, the pumping speed was very slow and the

vapor pressure Vapor pressure or equilibrium vapor pressure is the pressure exerted by a vapor in thermodynamic equilibrium with its condensed phases (solid or liquid) at a given temperature in a closed system. The equilibrium vapor pressure is an indicat ...

of the liquid mercury limited the ultimate vacuum. Following his invention of the molecular pump, Wolfgang Gaede invented the diffusion pump in 1915, and originally used elemental mercury as the working fluid. After its invention, the design was quickly commercialized by Leybold. It was then improved by

Irving Langmuir Irving Langmuir (; January 31, 1881 – August 16, 1957) was an American chemist, physicist, and metallurgical engineer. He was awarded the Nobel Prize in Chemistry in 1932 for his work in surface chemistry. Langmuir's most famous publicatio ...

and W. Crawford. Cecil Reginald Burch discovered the possibility of using

in 1928.

Oil diffusion pumps

An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to , diffusion pumps today can produce pressures approaching when properly used with modern fluids and accessories. The features that make the diffusion pump attractive for high and ultra-high vacuum use are its high pumping speed for all gases and low cost per unit pumping speed when compared with other types of pump used in the same vacuum range. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump is typically used to maintain an outlet pressure around . The oil diffusion pump is operated with an oil of low

. The high speed jet is generated by boiling the fluid and directing the vapor through a jet assembly. Note that the oil is gaseous when entering the nozzles. Within the nozzles, the flow changes from laminar to

supersonic Supersonic speed is the speed of an object that exceeds the speed of sound (Mach 1). For objects traveling in dry air of a temperature of 20 °C (68 °F) at sea level, this speed is approximately . Speeds greater than five times ...

and

molecular A molecule is a group of two or more atoms that are held together by attractive forces known as chemical bonds; depending on context, the term may or may not include ions that satisfy this criterion. In quantum physics, organic chemistry, ...

. Often, several jets are used in series to enhance the pumping action. The outside of the diffusion pump is cooled using either air flow, water lines or a water-filled jacket. As the vapor jet hits the outer cooled shell of the diffusion pump, the working fluid condenses and is recovered and directed back to the boiler. The pumped gases continue flowing to the base of the pump at increased pressure, flowing out through the diffusion pump outlet, where they are compressed to ambient pressure by the secondary mechanical forepump and exhausted. Unlike

turbomolecular pump A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collis ...

s and

cryopump A cryopump or a "cryogenic pump" is a vacuum pump that traps gases and vapours by condensing them on a cold surface, but are only effective on some gases. The effectiveness depends on the freezing and boiling points of the gas relative to the cry ...

s, diffusion pumps have no moving parts and as a result are quite durable and reliable. They can function over pressure ranges of . They are driven only by

convection Convection is single or Multiphase flow, multiphase fluid flow that occurs Spontaneous process, spontaneously through the combined effects of material property heterogeneity and body forces on a fluid, most commonly density and gravity (see buoy ...

and thus have a very low energy efficiency. One major disadvantage of diffusion pumps is the tendency to backstream oil into the vacuum chamber. This oil can contaminate surfaces inside the chamber or upon contact with hot filaments or electrical discharges may result in carbonaceous or siliceous deposits. Due to backstreaming, oil diffusion pumps are not suitable for use with highly sensitive analytical equipment or other applications which require an extremely clean vacuum environment, but mercury diffusion pumps may be in the case of ultra high vacuum chambers used for metal deposition. Often cold traps and baffles are used to minimize backstreaming, although this results in some loss of pumping speed. The oil of a diffusion pump cannot be exposed to the atmosphere when hot. If this occurs, the oil will oxidise and has to be replaced. If a fire occurs, the smoke and residue may contaminate other parts of the system.

Oil types

The least expensive diffusion pump oils are based on

hydrocarbon In organic chemistry, a hydrocarbon is an organic compound consisting entirely of hydrogen and carbon. Hydrocarbons are examples of group 14 hydrides. Hydrocarbons are generally colourless and Hydrophobe, hydrophobic; their odor is usually fain ...

s which have been purified by double-distillation. Compared with the other fluids, they have higher vapor pressure, so are usually limited to a pressure of . They are also the most likely to burn or explode if exposed to oxidizers. The most common

s used in diffusion pumps are trisiloxanes, which contain the chemical group Si-O-Si-O-Si, to which various

phenyl group In organic chemistry, the phenyl group, or phenyl ring, is a cyclic group of atoms with the formula , and is often represented by the symbol Ph (archaically φ) or Ø. The phenyl group is closely related to benzene and can be viewed as a benzene ...

s or

methyl group In organic chemistry, a methyl group is an alkyl derived from methane, containing one carbon atom bonded to three hydrogen atoms, having chemical formula (whereas normal methane has the formula ). In formulas, the group is often abbreviated a ...

s are attached. These are available as the so-called 702 and 703 blends, which were formerly manufactured by

Dow Corning Dow Corning Corporation, was an American multinational corporation headquartered in Midland, Michigan, United States, and was originally established as a joint venture between The Dow Chemical Company and Corning Inc., Corning Incorporated. In 20 ...

. These can be further separated into 704 and 705 oils, which are made up of the isomers of tetraphenyl tetramethyl trisiloxane and pentaphenyl trimethyl trisiloxane respectively. For pumping reactive species, usually a

based oil is used. These oils are the most chemical and heat resistant type of diffusion pump oil.

Steam ejectors

The steam ejector is a popular form of pump for vacuum

distillation Distillation, also classical distillation, is the process of separating the component substances of a liquid mixture of two or more chemically discrete substances; the separation process is realized by way of the selective boiling of the mixt ...

and

freeze-drying Freeze drying, also known as lyophilization or cryodesiccation, is a low temperature Food drying, dehydration process that involves freezing the product and lowering pressure, thereby removing the ice by Sublimation (phase transition), sublimat ...

. A jet of steam entrains the vapour that must be removed from the vacuum chamber. Steam ejectors can have single or multiple stages, with and without

condensers __NOTOC__ Condenser may refer to: Heat transfer * Condenser (heat transfer), a device or unit used to condense vapor into liquid. Specific types include: ** Heat exchanger#HVAC and refrigeration air coils, HVAC air coils ** Condenser (laboratory), ...

in between the stages. While both steam ejectors and diffusion pumps use jets of vapor to entrain gas, they work on fundamentally different principles - steam ejectors rely on viscous flow and mixing to pump gas, whereas diffusion pumps use molecular diffusion. This has several consequences. In diffusion pumps, the inlet pressure can be much lower than the static pressure of jet, whereas in steam ejectors the two pressures are about the same. Also, diffusion pumps are capable of much higher compression ratios, and cannot discharge directly to atmosphere.

References

External links

An oil diffusion pump built from glass by the Arizona State University Main