Patterning By Etching At The Nanoscale
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Patterning By Etching At The Nanoscale
{{More citations needed, date=May 2022 200px, Figure 1 - Example of a procedure using ammonium fluoride as an etchant and polymer brushes for visualisation Patterning by Etching at the nanoscale (PENs) is a soft lithographic technique in which the bonds in the polydimethylsiloxane (PDMS) matrix are broken to controlably etch PDMS (i.e. dissolve) at a slow rate along the outside of a PDMS channel formed with a patterned PDMS stamp applied to a surface. The channel in the stamp can be enlarged in the order of tens of nanometers to several micrometres. Exposing a fresh area of a surface that can be reacted with. Summary PDMS contains polymer chains of silicon-oxygen bonds, these bonds can be broken by fluoride containing species, in the same way that silicon wafers are prepared by etching with hydrofluoric acid, ammonium fluoride Ammonium fluoride is the inorganic compound with the formula NH4F. It crystallizes as small colourless prisms, having a sharp saline taste, and is ...
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PDMS Etching Scheeme
PDMS may refer to: * Palm Desert Middle School, a middle school in Palm Desert, California * Plant Design Management System * Plasma desorption mass spectrometry * Point-Defence Missile System * Polydimethylsiloxane Polydimethylsiloxane (PDMS), also known as dimethylpolysiloxane or dimethicone, is a silicone polymer with a wide variety of uses, from cosmetics to industrial lubrication and passive daytime radiative cooling. PDMS is particularly known for its ..., a silicon-based organic polymer {{disambig ja:艦対空ミサイル#個艦防空ミサイル ...
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Soft Lithography
In technology, soft lithography is a family of techniques for fabricating or Replication (other), replicating structures using "elastomeric stamps, molds, and conformable photomasks". It is called "soft" because it uses elastomeric materials, most notably Polydimethylsiloxane, PDMS. Soft lithography is generally used to construct features measured on the micrometer to nanometer Scale (measurement), scale. According to Rogers and Nuzzo (2005), Research and development, development of soft lithography expanded rapidly from 1995 to 2005. Soft lithography tools are now commercially available. Types * PDMS stamp * Microcontact printing * Multilayer soft lithography * Nanosphere lithography * Patterning by etching at the nanoscale Advantages Soft lithography has some unique advantages over other forms of lithography (such as photolithography and electron beam lithography). They include the following: *Lower cost than traditional photolithography in mass production *Well- ...
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Polydimethylsiloxane
Polydimethylsiloxane (PDMS), also known as dimethylpolysiloxane or dimethicone, is a silicone polymer with a wide variety of uses, from cosmetics to industrial lubrication and passive daytime radiative cooling. PDMS is particularly known for its unusual rheological (or flow) properties. It is optically clear and, in general, inert, non-toxic, and non-flammable. It is one of several types of silicone oil (polymerized siloxane). The applications of PDMS range from contact lenses and medical devices to elastomers; it is also present in shampoos (as it makes hair shiny and slippery), food ( antifoaming agent), caulk, lubricants and heat-resistant tiles. Structure The chemical formula of PDMS is , where ''n'' is the number of repeating monomer units. Industrial synthesis can begin from dimethyldichlorosilane and water by the following net reaction: : + (''n''+1) The polymerization reaction evolves hydrochloric acid. For medical and domestic applications, a process wa ...
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PDMS Stamp
PDMS stamps are pieces of polydimethylsiloxane (PDMS), a silicone, that have been patterned usually against a master mold to form a relief pattern used in soft lithography. This PDMS stamp can be used in either its current form as a relief surface for techniques such as microcontact printing or can also be attached to an external source by tubing so that liquid may be passed through channels on its surface. In this second case it will often be laminated to a surface so that chemistry can be performed on that surface producing a pattern of the PDMS stamp on to the surface. Alternatively a PDMS stamp can be laminated to a second piece of PDMS to form a contained device. It is possible to pattern PDMS with nanometre resolution. PDMS stamps can be procured from some commercial sources such as Research Micro Stamps. Many techniques have been developed to modify the basic setups to perform a range of tasks such as assays on small volumes. These kinds of devices are often referred to a ...
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Nanometers
330px, Different lengths as in respect to the molecular scale. The nanometre (international spelling as used by the International Bureau of Weights and Measures; SI symbol: nm), or nanometer (American and British English spelling differences#-re, -er, American spelling), is a units of measurement, unit of length in the International System of Units (SI), equal to one billionth ( short scale) or one thousand million (long scale) of a meter (0.000000001 m) and to 1000 picometres. One nanometre can be expressed in scientific notation as 1 × 10−9 m and as  m. History The nanometre was formerly known as the "''millimicrometre''" – or, more commonly, the "''millimicron''" for short – since it is of a micrometer. It was often denoted by the symbol ''mμ'' or, more rarely, as ''μμ'' (however, ''μμ'' should refer to a ''millionth'' of a micron). Etymology The name combines the SI prefix ''nano-'' (from the Ancient Greek , ', "dwarf") with the ...
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Micrometre
The micrometre (English in the Commonwealth of Nations, Commonwealth English as used by the International Bureau of Weights and Measures; SI symbol: μm) or micrometer (American English), also commonly known by the non-SI term micron, is a unit of length in the International System of Units (SI) equalling (SI standard prefix "micro-" = ); that is, one millionth of a metre (or one thousandth of a millimetre, , or about ). The nearest smaller common SI Unit, SI unit is the nanometre, equivalent to one thousandth of a micrometre, one millionth of a millimetre or one billionth of a metre (). The micrometre is a common unit of measurement for wavelengths of infrared radiation as well as sizes of biological cell (biology), cells and bacteria, and for grading wool by the diameter of the fibres. The width of a single human hair ranges from approximately 20 to . Examples Between 1 μm and 10 μm: * 1–10 μm – length of a typical bacterium * 3–8 μm – width of str ...
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Fluoride
Fluoride (). According to this source, is a possible pronunciation in British English. is an Inorganic chemistry, inorganic, Monatomic ion, monatomic Ion#Anions and cations, anion of fluorine, with the chemical formula (also written ), whose salts are typically white or colorless. Fluoride salts typically have distinctive bitter tastes, and are odorless. Its salts and minerals are important Reagent, chemical reagents and industrial chemicals, mainly used in the production of hydrogen fluoride for fluorocarbons. Fluoride is classified as a weak base since it only partially associates in solution, but concentrated fluoride is corrosive and can attack the skin. Fluoride is the simplest fluorine anion. In terms of charge and size, the fluoride ion resembles the hydroxide ion. Fluoride ions occur on Earth in several minerals, particularly fluorite, but are present only in trace quantities in bodies of water in nature. Nomenclature Fluorides include compounds that contain ionic ...
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Wafer (electronics)
In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si, silicium), used for Semiconductor device fabrication, the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The wafer serves as the substrate (materials science), substrate for microelectronic devices built in and upon the wafer. It undergoes many microfabrication processes, such as doping (semiconductor), doping, ion implantation, Etching (microfabrication), etching, thin-film deposition of various materials, and Photolithography, photolithographic patterning. Finally, the individual microcircuits are separated by wafer dicing and Integrated circuit packaging, packaged as an integrated circuit. History In the semiconductor industry, the term wafer appeared in the 1950s to describe a thin round slice of semiconductor material, typically germanium or silicon. The round shape characteristic of these wafers comes f ...
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Hydrofluoric Acid
Hydrofluoric acid is a solution of hydrogen fluoride (HF) in water. Solutions of HF are colorless, acidic and highly corrosive. A common concentration is 49% (48–52%) but there are also stronger solutions (e.g. 70%) and pure HF has a boiling point near room temperature. It is used to make most organofluorine compounds; examples include the commonly used pharmaceutical antidepressant medication fluoxetine (Prozac) and the material PTFE (Teflon). Elemental fluorine is produced from it. It is commonly used to etch glass and silicon wafers. Uses Production of organofluorine compounds The principal use of hydrofluoric acid is in organofluorine chemistry. Many organofluorine compounds are prepared using HF as the fluorine source, including Teflon, fluoropolymers, fluorocarbons, and refrigerants such as freon. Many pharmaceuticals contain fluorine. Production of inorganic fluorides Most high-volume inorganic fluoride compounds are prepared from hydrofluoric acid. Foremost ...
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Ammonium Fluoride
Ammonium fluoride is the inorganic compound with the formula NH4F. It crystallizes as small colourless prisms, having a sharp saline taste, and is highly soluble in water. Like all fluoride salts, it is moderately toxic in both acute and chronic overdose. Crystal structure Ammonium fluoride adopts the wurtzite crystal structure, in which both the ammonium cations and the fluoride anions are stacked in ABABAB... layers, each being tetrahedrally surrounded by four of the other. There are N−H···F hydrogen bonds between the anions and cations. This structure is very similar to ice, and ammonium fluoride is the only substance which can form mixed crystals with water. Reactions On passing hydrogen fluoride gas (in excess) through the salt, ammonium fluoride absorbs the gas to form the addition compound ammonium bifluoride. The reaction occurring is: :NH4F + HF → NH4HF2 Ammonium fluoride sublimes when heated—a property common among ammonium salts. In the sublimation, the salt ...
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