Shallow Trench Isolation
   HOME



picture info

Shallow Trench Isolation
Shallow trench isolation (STI), also known as box isolation technique, is an integrated circuit feature which prevents electric current leakage between adjacent semiconductor device components. STI is generally used on CMOS process technology nodes of 250 nanometers and smaller. Older CMOS technologies and non-MOS technologies commonly use isolation based on LOCOS. STI is created early during the semiconductor device fabrication process, before transistors are formed. The key steps of the STI process involve etching a pattern of trenches in the silicon, depositing one or more dielectric materials (such as silicon dioxide) to fill the trenches, and removing the excess dielectric using a technique such as chemical-mechanical planarization. Certain semiconductor fabrication technologies also include deep trench isolation, a related feature often found in analog integrated circuits. The effect of the trench edge has given rise to what has recently been termed the "reverse narrow ...
[...More Info...]      
[...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   [Amazon]




Isolation Pitch Vs Design Rule
Social isolation, Isolation is the near or complete lack of social contact by an individual. Isolation or isolated may also refer to: Sociology and psychology *Social isolation *Isolation (psychology), a defense mechanism in psychoanalytic theory *Emotional isolation, a feeling of isolation despite a functioning social network *Isolation effect, a psychological effect of distinctive items more easily remembered Mathematics * Real-root isolation * Isolation lemma, a technique used to reduce the number of solutions to a computational problem. * Isolated point, a topological notion of having no points near a given point Natural sciences *Electrical or galvanic isolation, isolating functional sections of electrical systems to prevent current flowing between them *An isolated system, a system without any external exchange *Isolating language, a type of language with a low morpheme-per-word ratio *Isolation (microbiology), techniques to separate microbes from a sample containing mixt ...
[...More Info...]      
[...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   [Amazon]



MORE