SEM-EDX
Energy-dispersive X-ray spectroscopy (EDS, EDX, EDXS or XEDS), sometimes called energy dispersive X-ray analysis (EDXA or EDAX) or energy dispersive X-ray microanalysis (EDXMA), is an analytical technique used for the elemental analysis or characterization (materials science), chemical characterization of a sample. It relies on an interaction of some X-ray generator, source of X-ray excitation and a sample (material), sample. Its characterization capabilities are due in large part to the fundamental principle that each element has a unique atom, atomic structure allowing a unique set of peaks on its electromagnetic emission spectrum (which is the main principle of spectroscopy). The peak positions are predicted by the Moseley's law with accuracy much better than experimental resolution of a typical EDX instrument. To stimulate the emission of characteristic X-rays from a specimen a beam of electrons is focused into the sample being studied. At rest, an atom within the sample conta ...
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