Tungsten nitride (W
2N, WN, WN
2) is an inorganic compound, a
nitride
In chemistry, a nitride is a chemical compound of nitrogen. Nitrides can be inorganic or organic, ionic or covalent. The nitride anion, N3−, is very elusive but compounds of nitride are numerous, although rarely naturally occurring. Some nitr ...
of
tungsten
Tungsten (also called wolfram) is a chemical element; it has symbol W and atomic number 74. It is a metal found naturally on Earth almost exclusively in compounds with other elements. It was identified as a distinct element in 1781 and first ...
.
It is a hard, solid, brown-colored
ceramic
A ceramic is any of the various hard, brittle, heat-resistant, and corrosion-resistant materials made by shaping and then firing an inorganic, nonmetallic material, such as clay, at a high temperature. Common examples are earthenware, porcela ...
material that is electrically conductive and decomposes in water.
It is used in
microelectronics
Microelectronics is a subfield of electronics. As the name suggests, microelectronics relates to the study and manufacture (or microfabrication) of very small electronic designs and components. Usually, but not always, this means micrometre ...
as a
contact material, for conductive layers, and
barrier layers between
silicon
Silicon is a chemical element; it has symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic lustre, and is a tetravalent metalloid (sometimes considered a non-metal) and semiconductor. It is a membe ...
and other metals, e.g.
tungsten
Tungsten (also called wolfram) is a chemical element; it has symbol W and atomic number 74. It is a metal found naturally on Earth almost exclusively in compounds with other elements. It was identified as a distinct element in 1781 and first ...
or
copper
Copper is a chemical element; it has symbol Cu (from Latin ) and atomic number 29. It is a soft, malleable, and ductile metal with very high thermal and electrical conductivity. A freshly exposed surface of pure copper has a pinkish-orang ...
. It is less commonly used than
titanium nitride
Titanium nitride (TiN; sometimes known as tinite) is an extremely hard ceramic material, often used as a physical vapor deposition (PVD) coating on titanium alloys, steel, carbide, and aluminium components to improve the substrate's surface prop ...
or
tungsten
Tungsten (also called wolfram) is a chemical element; it has symbol W and atomic number 74. It is a metal found naturally on Earth almost exclusively in compounds with other elements. It was identified as a distinct element in 1781 and first ...
films.
Tungsten nitride forms together with
tungsten dioxide,
tungsten trioxide
Tungsten(VI) oxide, also known as tungsten trioxide is a chemical compound of oxygen and the transition metal tungsten, with formula WO3. The compound is also called tungstic anhydride, reflecting its relation to tungstic acid . It is a light ...
, and
tungsten pentoxide when an
incandescent light bulb
An incandescent light bulb, also known as an incandescent lamp or incandescent light globe, is an electric light that produces illumination by Joule heating a #Filament, filament until it incandescence, glows. The filament is enclosed in a ...
breaks while the filament is heated.
Tungsten silicide is another material with similar use.
References
Tungsten compounds
Nitrides
Ceramic materials
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