Slot-waveguide
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A slot-waveguide is an
optical waveguide An optical waveguide is a physical structure that guides electromagnetic waves in the optical spectrum. Common types of optical waveguides include optical fiber waveguides, transparent dielectric waveguides made of plastic and glass, liquid ligh ...
that guides strongly confined
light Light, visible light, or visible radiation is electromagnetic radiation that can be visual perception, perceived by the human eye. Visible light spans the visible spectrum and is usually defined as having wavelengths in the range of 400– ...
in a sub
wavelength In physics and mathematics, wavelength or spatial period of a wave or periodic function is the distance over which the wave's shape repeats. In other words, it is the distance between consecutive corresponding points of the same ''phase (waves ...
-scale low
refractive index In optics, the refractive index (or refraction index) of an optical medium is the ratio of the apparent speed of light in the air or vacuum to the speed in the medium. The refractive index determines how much the path of light is bent, or refrac ...
region by
total internal reflection In physics, total internal reflection (TIR) is the phenomenon in which waves arriving at the interface (boundary) from one medium to another (e.g., from water to air) are not refracted into the second ("external") medium, but completely refl ...
. A slot-waveguide consists of two strips or slabs of high-refractive-index (nH) materials separated by a subwavelength-scale low-refractive-index (nS) slot region and surrounded by low-refractive-index (nC) cladding materials.


Principle of operation

The principle of operation of a slot-waveguide is based on the discontinuity of the
electric field An electric field (sometimes called E-field) is a field (physics), physical field that surrounds electrically charged particles such as electrons. In classical electromagnetism, the electric field of a single charge (or group of charges) descri ...
(E-field) at high-refractive-index-contrast interfaces.
Maxwell’s equations Maxwell's equations, or Maxwell–Heaviside equations, are a set of coupled partial differential equations that, together with the Lorentz force law, form the foundation of classical electromagnetism, classical optics, electric and magnetic circ ...
state that, to satisfy the continuity of the normal component of the
electric displacement field In physics, the electric displacement field (denoted by D), also called electric flux density, is a vector field that appears in Maxwell's equations. It accounts for the electromagnetic effects of polarization and that of an electric field, com ...
D at an interface, the corresponding E-field must undergo a discontinuity with higher amplitude in the low-refractive-index side. That is, at an interface between two regions of
dielectric constant The relative permittivity (in older texts, dielectric constant) is the permittivity of a material expressed as a ratio with the electric permittivity of a vacuum. A dielectric is an insulating material, and the dielectric constant of an insul ...
s εS and εH, respectively: :''DSN=DHN'' :''εSESNHEHN'' :''nS2ESN=nH2EHN'' where the superscript N indicates the normal components of D and E vector fields. Thus, if , then ESN>>EHN. Given that the slot critical dimension (distance between the high-index slabs or strips) is comparable to the
exponential decay A quantity is subject to exponential decay if it decreases at a rate proportional to its current value. Symbolically, this process can be expressed by the following differential equation, where is the quantity and (lambda Lambda (; uppe ...
length of the fundamental
eigenmode The mode of electromagnetic systems describes the field pattern of the propagating waves. Some of the classifications of electromagnetic modes include; * Modes in waveguides and transmission lines. These modes are analogous to the normal modes of ...
of the guided-wave structure, the resulting E-field normal to the high-index-contrast interfaces is enhanced in the slot and remains high across it. The power density in the slot is much higher than that in the high-index regions. Since wave propagation is due to total internal reflection, there is no interference effect involved and the slot-structure exhibits very low wavelength sensitivity.


Invention

The slot-waveguide was born in 2003 as an unexpected outcome of theoretical studies on
metal A metal () is a material that, when polished or fractured, shows a lustrous appearance, and conducts electrical resistivity and conductivity, electricity and thermal conductivity, heat relatively well. These properties are all associated wit ...
-
oxide An oxide () is a chemical compound containing at least one oxygen atom and one other element in its chemical formula. "Oxide" itself is the dianion (anion bearing a net charge of −2) of oxygen, an O2− ion with oxygen in the oxidation st ...
-
semiconductor A semiconductor is a material with electrical conductivity between that of a conductor and an insulator. Its conductivity can be modified by adding impurities (" doping") to its crystal structure. When two regions with different doping level ...
(MOS)
electro-optic Electro–optics is a branch of electrical engineering, electronic engineering, materials science, and material physics involving components, electronic devices such as lasers, laser diodes, LEDs, waveguides, etc. which operate by the propa ...
modulation Signal modulation is the process of varying one or more properties of a periodic waveform in electronics and telecommunication for the purpose of transmitting information. The process encodes information in form of the modulation or message ...
in high-confinement silicon photonic waveguides by Vilson Rosa de Almeida and Carlos Angulo Barrios, then a Ph.D. student and a postdoctoral associate, respectively, at
Cornell University Cornell University is a Private university, private Ivy League research university based in Ithaca, New York, United States. The university was co-founded by American philanthropist Ezra Cornell and historian and educator Andrew Dickson W ...
. Theoretical analysis and experimental demonstration of the first slot-waveguide implemented in the Si/SiO2 material system at 1.55 μm operation wavelength were reported by Cornell researchers in 2004. Since these pioneering works, several guided-wave configurations based on the slot-waveguide concept have been proposed and demonstrated. Relevant examples are the following: In 2005, researchers at the
Massachusetts Institute of Technology The Massachusetts Institute of Technology (MIT) is a Private university, private research university in Cambridge, Massachusetts, United States. Established in 1861, MIT has played a significant role in the development of many areas of moder ...
proposed to use multiple slot regions in the same guided-wave structure (multi-slot waveguide) in order to increase the optical field in the low-refractive-index regions. The experimental demonstration of such multiple slot waveguide in a horizontal configuration was first published in 2007. In 2006, the slot-waveguide approach was extended to the terahertz frequency band by researchers at
RWTH Aachen University RWTH Aachen University (), in German ''Rheinisch-Westfälische Technische Hochschule Aachen'', is a German public research university located in Aachen, North Rhine-Westphalia, Germany. With more than 47,000 students enrolled in 144 study prog ...
. Researchers at the
California Institute of Technology The California Institute of Technology (branded as Caltech) is a private research university in Pasadena, California, United States. The university is responsible for many modern scientific advancements and is among a small group of institutes ...
also demonstrated that a slot waveguide, in combination with nonlinear
electrooptic polymers Electro–optics is a branch of electrical engineering, electronic engineering, materials science, and material physics involving components, electronic devices such as lasers, laser diodes, LEDs, waveguides, etc. which operate by the propaga ...
, could be used to build ring modulators with exceptionally high tunability. Later this same principle enabled Baehr-Jones et al. to demonstrate a mach-zehnder modulator with an exceptionally low drive voltage of 0.25 V In 2007, a non-planar implementation of the slot-waveguide principle of operation was demonstrated by researchers at the
University of Bath The University of Bath is a public research university in Bath, England. Bath received its royal charter in 1966 as Bath University of Technology, along with a number of other institutions following the Robbins Report. Like the University ...
. They showed concentration of optical energy within a subwavelength-scale air hole running down the length of a
photonic-crystal fiber Photonic-crystal fiber (PCF) is a class of optical fiber based on the properties of Photonic crystal, photonic crystals. It was first explored in 1996 at University of Bath, UK. Because of its ability to confine light in hollow cores or with c ...
. Recently, in 2016, it is shown that slots in a pair of waveguides if off-shifted away from each other can enhance the coupling coefficient even more than 100% if optimized properly, and thus the effective power coupling length between the waveguides can significantly be reduced. Hybrid slot (having vertical slot in one waveguide and horizontal slot in the other) assisted polarization beam splitter is also numerically demonstrated. Though, the losses are high for such slot structures, this scheme exploiting the asymmetric slots may have potential to design very compact optical directional couplers and polarization beam splitters for on-chip integrated optical devices. The slot waveguide bend is another structure essential to the waveguide design of several Integrated micro- and nano-optics devices. One of the benefits of waveguide bends is the reduction of the footprint size of the device. There are two approaches based on the similarity of Si rails width to form the sharp bend in slot waveguide, which are the symmetric and asymmetric slot waveguides.


Fabrication

Planar slot-waveguides have been fabricated in different material systems such as Si/SiO2 and Si3N4/SiO2. Both vertical (slot plane is normal to the substrate plane) and horizontal (slot plane is parallel to the substrate plane) configurations have been implemented by using conventional micro- and nano-fabrication techniques. These processing tools include
electron beam lithography Electron-beam lithography (often abbreviated as e-beam lithography or EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). The electron ...
,
photolithography Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer. The process begins with a photosensiti ...
,
chemical vapour deposition Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (subst ...
sually low-pressure chemical vapour deposition (LPCVD) or plasma enhanced chemical vapour deposition (PECVD)
thermal oxidation In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react with it. The ra ...
,
reactive-ion etching Reactive-ion etching (RIE) is an etching (microfabrication), etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than Isotropic etching, wet etching. RIE uses chemical reaction, chemically ...
and
focused ion beam Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a sc ...
. In vertical slot-waveguides, the slot and strips widths are defined by electron- or photo-lithography and dry etching techniques whereas in horizontal slot-waveguides the slot and strips thicknesses are defined by a thin-film deposition technique or thermal oxidation. Thin film deposition or oxidation provides better control of the layers dimensions and smoother interfaces between the high-index-contrast materials than lithography and dry etching techniques. This makes horizontal slot-waveguides less sensitive to scattering optical losses due to interface roughness than vertical configurations. Fabrication of a non-planar (fiber-based) slot-waveguide configuration has also been demonstrated by means of conventional microstructured
optical fiber An optical fiber, or optical fibre, is a flexible glass or plastic fiber that can transmit light from one end to the other. Such fibers find wide usage in fiber-optic communications, where they permit transmission over longer distances and at ...
technology.


Applications

A slot-waveguide produces high E-field amplitude,
optical power In optics, optical power (also referred to as dioptric power, refractive power, focal power, focusing power, or convergence power) is the degree to which a lens, mirror, or other optical system converges or diverges light. It is equal to the ...
, and optical
intensity Intensity may refer to: In colloquial use * Strength (disambiguation) *Amplitude * Level (disambiguation) * Magnitude (disambiguation) In physical sciences Physics *Intensity (physics), power per unit area (W/m2) *Field strength of electric, m ...
in low-index materials at levels that cannot be achieved with conventional waveguides. This property allows highly efficient interaction between fields and active materials, which may lead to all-
optical switching An optical transistor, also known as an optical switch or a light valve, is a device that switches or amplifies optical signals. Light occurring on an optical transistor's input changes the intensity of light emitted from the transistor's output w ...
,
optical amplification An optical amplifier is a device that amplifies an optical signal directly, without the need to first convert it to an electrical signal. An optical amplifier may be thought of as a laser without an optical cavity, or one in which feedback from ...
and optical detection on integrated photonics. Strong E-field confinement can be localized in a
nanometer 330px, Different lengths as in respect to the Molecule">molecular scale. The nanometre (international spelling as used by the International Bureau of Weights and Measures; SI symbol: nm), or nanometer (American spelling Despite the va ...
-scale low-index region. As firstly pointed out in, the slot waveguide can be used to greatly increase the sensitivity of compact optical sensing devices or to enhance the efficiency of
near-field optics Near-field optics is that branch of optics that considers configurations that depend on the passage of light to, from, through, or near an element with subwavelength features, and the coupling of that light to a second element located a subwavelen ...
probes. At Terahertz frequencies, slot waveguide based splitter has been designed which allows for low loss propagation of Terahertz waves. The device acts as a splitter through which maximum throughput can be achieved by adjusting the arm length ratio of the input to the output side.{{cite journal , last1=Pandey , first1=Shashank , last2=Kumar , first2=Gagan , last3=Nahata , first3=Ajay , title=Slot waveguide-based splitters for broadband terahertz radiation , journal=Optics Express , publisher=The Optical Society , volume=18 , issue=22 , date=2010-10-22 , pages=23466–71 , issn=1094-4087 , doi=10.1364/oe.18.023466 , pmid=21164689 , doi-access=free , bibcode=2010OExpr..1823466P


References

Optical components Photonics