Semiconductor-die Cutting
   HOME

TheInfoList



OR:

Die preparation is a step of
semiconductor device fabrication Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as microprocessors, microcontrollers, and memories (such as Random-access memory, RAM and flash memory). It is a ...
during which a
wafer A wafer is a crisp, often sweet, very thin, flat, light biscuit, often used to decorate ice cream, and also used as a garnish on some sweet dishes. They frequently have a waffle surface pattern but may also be patterned with insignia of the foo ...
is prepared for
IC packaging Integrated circuit packaging is the final stage of semiconductor device fabrication, in which the die is encapsulated in a supporting case that prevents physical damage and corrosion. The case, known as a " package", supports the electrical c ...
and IC testing. The process of die preparation typically consists of two steps: wafer mounting and
wafer dicing Die singulation, also called wafer dicing, is the process in semiconductor device fabrication by which dies are separated from a finished wafer of semiconductor. It can involve scribing and breaking, mechanical sawing (normally with a machine c ...
.


Wafer mounting

Wafer mounting is a step that is performed during the
die Die, as a verb, refers to death, the cessation of life. Die may also refer to: Games * Die, singular of dice, small throwable objects used for producing random numbers Manufacturing * Die (integrated circuit), a rectangular piece of a semicondu ...
preparation of a
wafer A wafer is a crisp, often sweet, very thin, flat, light biscuit, often used to decorate ice cream, and also used as a garnish on some sweet dishes. They frequently have a waffle surface pattern but may also be patterned with insignia of the foo ...
as part of the process of
semiconductor fabrication Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as microprocessors, microcontrollers, and memories (such as RAM and flash memory). It is a multiple-step photol ...
. During this step, the wafer is mounted on a plastic tape that is attached to a ring. Wafer mounting is performed right before the wafer is cut into separate dies. The adhesive film upon which the wafer is mounted ensures that the individual dies remain firmly in place during 'dicing', as the process of cutting the wafer is called. The picture on the right shows a 300 mm wafer after it was mounted and diced. The blue plastic is the adhesive tape. The wafer is the round disc in the middle. In this case, a large number of dies were already removed.


Semiconductor-die cutting

In the manufacturing of micro-electronic devices, die cutting, dicing or singulation is a process of reducing a
wafer A wafer is a crisp, often sweet, very thin, flat, light biscuit, often used to decorate ice cream, and also used as a garnish on some sweet dishes. They frequently have a waffle surface pattern but may also be patterned with insignia of the foo ...
containing multiple identical
integrated circuit An integrated circuit (IC), also known as a microchip or simply chip, is a set of electronic circuits, consisting of various electronic components (such as transistors, resistors, and capacitors) and their interconnections. These components a ...
s to individual dies each containing one of those circuits. During this process, a wafer with up to thousands of circuits is cut into rectangular pieces, each called a die. In between those functional parts of the circuits, a thin non-functional spacing is foreseen where a saw can safely cut the wafer without damaging the circuits. This spacing is called the ''scribe line'' or ''saw street''. The width of the scribe is very small, typically around 100 
μm The micrometre (Commonwealth English as used by the International Bureau of Weights and Measures; SI symbol: μm) or micrometer (American English), also commonly known by the non-SI term micron, is a unit of length in the International System ...
. A very thin and accurate saw is therefore needed to cut the wafer into pieces. Usually the dicing is performed with a water-cooled circular saw with diamond-tipped teeth.


Types of blades

The most common make up of blade used is either a metal or resin bond containing abrasive grit of natural or more commonly synthetic diamond, or
borazon Borazon is a brand name of a cubic form of boron nitride (cBN). Its color ranges from black to brown and gold. It is one of the hardest known materials, along with various forms of diamond and other kinds of boron nitride. Borazon is a crystal cre ...
in various forms. Alternatively, the bond and grit may be applied as a coating to a metal former. See
diamond tools A diamond tool is a cutting tool with diamond grains fixed on the functional parts of the tool via a bonding material or another method. As diamond is a superhard material, diamond tools have many advantages as compared with tools made with commo ...
.


Further reading

* , section 11.4. Semiconductor device fabrication {{engineering-stub