Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of
elastomer
An elastomer is a polymer with viscoelasticity (i.e. both viscosity and elasticity) and with weak intermolecular forces, generally low Young's modulus and high failure strain compared with other materials. The term, a portmanteau of ''elastic p ...
.
Commercial PDMS stampsca
mold materials such as optical adhesivein a sequential process to create the bonded layers.
See also
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Soft lithography
In technology, soft lithography is a family of techniques for fabricating or replicating structures using "elastomeric stamps, molds, and conformable photomasks". It is called "soft" because it uses elastomeric materials, most notably PDMS.
So ...
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Lithography (microfabrication)