The ''Journal of Vacuum Science and Technology'' is a

peer-reviewed Peer review is the evaluation of work by one or more people with similar competencies as the producers of the work ( peers). It functions as a form of self-regulation by qualified members of a profession within the relevant field. Peer review ...

scientific journal In academic publishing, a scientific journal is a periodical publication designed to further the progress of science by disseminating new research findings to the scientific community. These journals serve as a platform for researchers, schola ...

published in two parts, ''A'' and ''B'', by the

American Institute of Physics The American Institute of Physics (AIP) promotes science and the profession of physics, publishes physics journals, and produces publications for scientific and engineering societies. The AIP is made up of various member societies. Its corpora ...

on behalf of the

American Vacuum Society AVS: Science and Technology of Materials, Interfaces, and Processing (formally the American Vacuum Society, Inc.) is a professional and scientific society founded in 1953 as a committee on vacuum technology. The AVS supports networking among its ...

. It was established in 1964 and the

editor-in-chief An editor-in-chief (EIC), also known as lead editor or chief editor, is a publication's editorial leader who has final responsibility for its operations and policies. The editor-in-chief heads all departments of the organization and is held accoun ...

is Eray Aydil (

University of Minnesota The University of Minnesota Twin Cities (historically known as University of Minnesota) is a public university, public Land-grant university, land-grant research university in the Minneapolis–Saint Paul, Twin Cities of Minneapolis and Saint ...

History

*1964–1982 ''Journal of Vacuum Science and Technology'' *1983–present ''Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films'' *1983–1990 ''Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena'' *1991–present ''Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures''

Part ''A''

Part ''A'' covers applied

surface science Surface science is the study of physical and chemical phenomena that occur at the interface of two phases, including solid–liquid interfaces, solid– gas interfaces, solid– vacuum interfaces, and liquid– gas interfaces. It includes the ...

, electronic materials and processing, fusion technology, plasma technology,

thin films A thin film is a layer of materials ranging from fractions of a nanometer ( monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many ...

, vacuum metallurgy, and vacuum technology. According to the ''

Journal Citation Reports ''Journal Citation Reports'' (''JCR'') is an annual publication by Clarivate. It has been integrated with the Web of Science and is accessed from the Web of Science Core Collection. It provides information about academic journals in the natur ...

'', the journal has a 2015

impact factor The impact factor (IF) or journal impact factor (JIF) of an academic journal is a type of journal ranking. Journals with higher impact factor values are considered more prestigious or important within their field. The Impact Factor of a journa ...

of 1.724.

Part ''B''

Part ''B'' covers vacuum and

plasma processing Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface. Plasma processing techniques include: *Plasma activation * Plasma ashing * Plasma cleaning * Plasma elec ...

of various materials, their structural characterization,

microlithography Microlithography is a general name for any manufacturing process that can create a minutely patterned thin film of protective materials over a substrate, such as a silicon wafer, in order to protect selected areas of it during subsequent etchin ...

, and the physics and chemistry of submicrometer and nanometer structures and devices. According to the ''

'', the journal has a 2014

of 1.398.

References

External links

* English-language journals Academic journals established in 1964 Bimonthly journals American Institute of Physics academic journals Vacuum Physics journals Hijacked journals {{Materials-journal-stub