The front-end-of-line (FEOL) is the first portion of IC fabrication where the individual components (

transistor upright=1.4, gate (G), body (B), source (S) and drain (D) terminals. The gate is separated from the body by an insulating layer (pink). A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch ...

capacitor A capacitor is a device that stores electrical energy in an electric field by virtue of accumulating electric charges on two close surfaces insulated from each other. It is a passive electronic component with two terminals. The effect of a ...

resistor A resistor is a passive two-terminal electrical component that implements electrical resistance as a circuit element. In electronic circuits, resistors are used to reduce current flow, adjust signal levels, to divide voltages, bias activ ...

s, etc.) are patterned in the

semiconductor A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. ...

. FEOL generally covers everything up to (but not including) the deposition of metal interconnect layers. For the CMOS process, FEOL contains all fabrication steps needed to form isolated CMOS elements: # Selecting the type of wafer to be used; Chemical-mechanical planarization and cleaning of the wafer. # Shallow trench isolation (STI) (or LOCOS in early processes, with

feature size Feature may refer to: Computing * Feature (CAD), could be a hole, pocket, or notch * Feature (computer vision), could be an edge, corner or blob * Feature (software design) is an intentional distinguishing characteristic of a software item ...

> 0.25 μm) #

Well formation A well is an excavation or structure created in the ground by digging, driving, or drilling to access liquid resources, usually water. The oldest and most common kind of well is a water well, to access groundwater in underground aquifers. The ...

Gate A gate or gateway is a point of entry to or from a space enclosed by walls. The word derived from old Norse "gat" meaning road or path; But other terms include '' yett and port''. The concept originally referred to the gap or hole in the wal ...

module formation # Source and drain module formation

See also

References

Further reading