Entegris, Inc. is an American provider of products and systems that purify, protect, and transport critical materials used in the semiconductor device fabrication process. Entegris operates out of its headquarters in Billerica, Massachusetts. The company has about 5,800 employees in manufacturing, service center, and research facilities in the United States, Canada, Malaysia, Singapore, Taiwan,

China China, officially the People's Republic of China (PRC), is a country in East Asia. It is the world's most populous country, with a population exceeding 1.4 billion, slightly ahead of India. China spans the equivalent of five time zones and ...

, Korea,

Japan Japan ( ja, 日本, or , and formally , ''Nihonkoku'') is an island country in East Asia. It is situated in the northwest Pacific Ocean, and is bordered on the west by the Sea of Japan, while extending from the Sea of Okhotsk in the north ...

, Israel, Ireland, Germany, and France. The company seeks to help manufacturers increase their yields by improving contamination control in several key processes, including

photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...

, wet etch and clean,

chemical-mechanical planarization Chemical mechanical polishing (CMP) or planarization is a process of smoothing surfaces with the combination of chemical and mechanical forces. It can be thought of as a hybrid of chemical etching and free abrasive polishing. Description The proc ...

, thin-film deposition, bulk chemical processing, wafer and reticle handling and shipping, and testing, assembly and packaging. Approximately 80% of the company's products are used in the semiconductor industry.

Products

Entegris products include: filtration products that purify process gases and fluids, as well as the ambient environment; liquid systems and components that dispense, control, or transport process fluids; high-performance materials and specialty gas management solutions; wafer carriers and shippers that protect the semiconductor wafer from contamination and breakage; and specialized graphite, silicon carbide, and coatings.

History

The company was incorporated in 1999 as the combined entity of Fluoroware, Inc., which began operating in 1966, and EMPAK, Inc. The company went public in 2000. In August 2005, Entegris merged with Mykrolis Corporation, a publicly held supplier of filtration products to the semiconductor industry. Mykrolis was spun-out of Millipore Corporation in 2000. In August 2008, Entegris acquired Poco Graphite, Inc., a

Decatur, Texas Decatur is the county seat of Wise County, Texas, United States. Its population was 6,538 in 2020. History Wise County was established in 1856, and Taylorsville (in honor of Zachary Taylor) was made the county seat. Absalom Bishop, an early sett ...

supplier of specialized graphite and silicon carbide products for use in semiconductor, EDM, glass bottling, biomedical, aerospace, and alternative energy applications. On April 30, 2014, Entegris acquired

Danbury, Connecticut Danbury is a city in Fairfield County, Connecticut, United States, located approximately northeast of New York City. Danbury's population as of 2022 was 87,642. It is the seventh largest city in Connecticut. Danbury is nicknamed the "Hat City ...

-based ATMI, a publicly held company providing critical materials and materials-handling solutions to the semiconductor industry, in a $1.1 billion transaction. In Dec 2020, Entegris announced an investment of US$500 million, building a state-of-the-art facility in Taiwan. The project is expected to complete in three years in Kaohsiung Science Park. In July 2022, Entegris acquired another US semiconductor chemicals company, CMC Materials Inc, for $5.7 billion. The acquisition, previously known as Cabot Microelectronics Corp, had 2,200 employees.

References

* Li1, S., Shih, S., Yen, S., Yang, J.: "Case Study of Microcontamination Control." ''Aerosol and Air Quality Research'', Vol. 7, No. 3, pp. 432–442, 2007 {{Authority control Manufacturing companies based in Massachusetts Manufacturing companies established in 1966 Equipment semiconductor companies 1966 establishments in Massachusetts Companies listed on the Nasdaq 2000 initial public offerings 2005 mergers and acquisitions 1999 mergers and acquisitions