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Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. CSI is currently the most common 
The technique encompasses but is not limited to instruments that use spectrally broadband, visible sources (
interference microscopy Interference microscopy involving measurements of differences in the path between two beams of light that have been split.
Types include:
* Classical interference microscopy
* Differential interference contrast microscopy
* Fluorescence interfere ...
technique for areal surface topography measurement. The term "CSI" was adopted by the International Organization for Standardization (ISO
ISO is the most common abbreviation for the International Organization for Standardization.
ISO or Iso may also refer to: Business and finance
* Iso (supermarket), a chain of Danish supermarkets incorporated into the SuperBest chain in 2007
* Is ...
).
The technique encompasses but is not limited to instruments that use spectrally broadband, visible sources (white light
White is the lightness, lightest color and is achromatic (having no hue). It is the color of objects such as snow, chalk, and milk, and is the opposite of black. White objects fully diffuse reflection, reflect and scattering, scatter all the ...
) to achieve interference fringe localization. CSI uses either fringe localization alone or in combination with interference fringe
In physics, interference is a phenomenon in which two waves combine by adding their displacement together at every single point in space and time, to form a resultant wave of greater, lower, or the same amplitude. Constructive and destructive ...
phase, depending on the surface type, desired surface topography repeatability and software capabilities. The table below compiles alternative terms that conform at least in part to the above definition.
References
Interferometry Optical instruments {{Optics-stub