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Chlorine trifluoride is an interhalogen compound with the formula . It is a colorless, poisonous, corrosive, and extremely reactive
gas Gas is a state of matter that has neither a fixed volume nor a fixed shape and is a compressible fluid. A ''pure gas'' is made up of individual atoms (e.g. a noble gas like neon) or molecules of either a single type of atom ( elements such as ...
that condenses to a pale-greenish yellow liquid, the form in which it is most often sold (pressurized at room temperature). It is notable for its extreme oxidation properties. The compound is primarily of interest in plasmaless cleaning and
etching Etching is traditionally the process of using strong acid or mordant to cut into the unprotected parts of a metal surface to create a design in intaglio (incised) in the metal. In modern manufacturing, other chemicals may be used on other type ...
operations in the
semiconductor industry The semiconductor industry is the aggregate of companies engaged in the design and fabrication of semiconductors and semiconductor devices, such as transistors and integrated circuits. Its roots can be traced to the invention of the transistor ...
, in nuclear reactor fuel processing, historically as a component in
rocket fuel Rocket propellant is used as reaction mass ejected from a rocket engine to produce thrust. The energy required can either come from the propellants themselves, as with a chemical rocket, or from an external source, as with ion engines. Overvi ...
s, and various other industrial operations owing to its corrosive nature.


Preparation, structure, and properties

It was first reported in 1930 by Ruff and Krug who prepared it by
fluorination In chemistry, halogenation is a chemical reaction which introduces one or more halogens into a chemical compound. Halide-containing compounds are pervasive, making this type of transformation important, e.g. in the production of polymers, drugs. ...
of
chlorine Chlorine is a chemical element; it has Symbol (chemistry), symbol Cl and atomic number 17. The second-lightest of the halogens, it appears between fluorine and bromine in the periodic table and its properties are mostly intermediate between ...
; this also produced
chlorine monofluoride Chlorine monofluoride is a volatile interhalogen compound with the chemical formula . It is a colourless gas at room temperature and is stable even at high temperatures. When cooled to −100 °C, ClF condenses as a pale yellow liquid. Many ...
(ClF) and the mixture was separated by
distillation Distillation, also classical distillation, is the process of separating the component substances of a liquid mixture of two or more chemically discrete substances; the separation process is realized by way of the selective boiling of the mixt ...
. : Several hundred tons are produced annually. The
molecular geometry Molecular geometry is the three-dimensional arrangement of the atoms that constitute a molecule. It includes the general shape of the molecule as well as bond lengths, bond angles, torsional angles and any other geometrical parameters that det ...
of is approximately T-shaped, with one short bond (1.598  Å) and two long bonds (1.698 Å). This structure agrees with the prediction of
VSEPR theory Valence shell electron pair repulsion (VSEPR) theory ( , ) is a conceptual model, model used in chemistry to predict the geometry of individual molecules from the number of electron pairs surrounding their central atoms. It is also named the Gill ...
, which predicts lone pairs of electrons as occupying two equatorial positions of a hypothetic trigonal
bipyramid In geometry, a bipyramid, dipyramid, or double pyramid is a polyhedron formed by fusing two Pyramid (geometry), pyramids together base (geometry), base-to-base. The polygonal base of each pyramid must therefore be the same, and unless otherwise ...
. The elongated Cl-F axial bonds are consistent with hypervalent bonding.


Reactions

also reacts explosively with water to give
hydrogen fluoride Hydrogen fluoride (fluorane) is an Inorganic chemistry, inorganic compound with chemical formula . It is a very poisonous, colorless gas or liquid that dissolves in water to yield hydrofluoric acid. It is the principal industrial source of fluori ...
and
hydrogen chloride The Chemical compound, compound hydrogen chloride has the chemical formula and as such is a hydrogen halide. At room temperature, it is a colorless gas, which forms white fumes of hydrochloric acid upon contact with atmospheric water vapor. Hyd ...
, along with oxygen and oxygen difluoride (): : : Upon heating, it decomposes: : Reactions with many metals and even metal oxides give
fluoride Fluoride (). According to this source, is a possible pronunciation in British English. is an Inorganic chemistry, inorganic, Monatomic ion, monatomic Ion#Anions and cations, anion of fluorine, with the chemical formula (also written ), whose ...
s: : : is used to produce
uranium hexafluoride Uranium hexafluoride, sometimes called hex, is the inorganic compound with the formula . Uranium hexafluoride is a volatile, white solid that is used in enriching uranium for nuclear reactors and nuclear weapons. Preparation Uranium dioxide is co ...
: : With
phosphorus Phosphorus is a chemical element; it has Chemical symbol, symbol P and atomic number 15. All elemental forms of phosphorus are highly Reactivity (chemistry), reactive and are therefore never found in nature. They can nevertheless be prepared ar ...
, it yields
phosphorus trichloride Phosphorus trichloride is an inorganic compound with the chemical formula PCl3. A colorless liquid when pure, it is an important industrial chemical, being used for the manufacture of phosphites and other organophosphorus compounds. It is toxic ...
() and phosphorus pentafluoride (), while
sulfur Sulfur ( American spelling and the preferred IUPAC name) or sulphur ( Commonwealth spelling) is a chemical element; it has symbol S and atomic number 16. It is abundant, multivalent and nonmetallic. Under normal conditions, sulfur atoms ...
yields
sulfur dichloride Sulfur dichloride is the chemical compound with the formula . This cherry-red liquid is the simplest sulfur chloride and one of the most common, and it is used as a precursor to organosulfur compounds. It is a highly corrosive and toxic substance ...
() and
sulfur tetrafluoride Sulfur tetrafluoride is a chemical compound with the formula S F4. It is a colorless corrosive gas that releases dangerous hydrogen fluoride gas upon exposure to water or moisture. Sulfur tetrafluoride is a useful reagent for the preparation o ...
(). It reacts with
caesium fluoride Caesium fluoride (cesium fluoride in American English) is an inorganic compound with the formula CsF. A hygroscopic white salt, caesium fluoride is used in the synthesis of organic compounds as a source of the fluoride anion. The compound is no ...
to give a salt containing the anion .


Uses


Semiconductor industry

In the
semiconductor A semiconductor is a material with electrical conductivity between that of a conductor and an insulator. Its conductivity can be modified by adding impurities (" doping") to its crystal structure. When two regions with different doping level ...
industry, chlorine trifluoride is used to clean
chemical vapour deposition Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (subst ...
chambers. It can be used to remove semiconductor material from the chamber walls without the need to dismantle the chamber. Unlike most of the alternative chemicals used in this role, it does not need to be activated by the use of plasma since the heat of the chamber is sufficient to make it decompose and react with the semiconductor material.


Fluorination reagent

ClF3 is used for the fluorination of a variety of compounds.


Military applications

Chlorine trifluoride has been investigated as a high-performance storable
oxidizer An oxidizing agent (also known as an oxidant, oxidizer, electron recipient, or electron acceptor) is a substance in a redox chemical reaction that gains or " accepts"/"receives" an electron from a (called the , , or ''electron donor''). In ot ...
in
rocket propellant Rocket propellant is used as reaction mass ejected from a rocket engine to produce thrust. The energy required can either come from the propellants themselves, as with a chemical rocket, or from an external source, as with ion engines. Overvi ...
systems. Handling concerns, however, severely limit its use. The following passage by rocket scientist John D. Clark is widely quoted in descriptions of the substance's extremely hazardous nature:
It is, of course, extremely toxic, but that's the least of the problem. It is
hypergolic A hypergolic propellant is a rocket propellant combination used in a rocket engine, whose components spontaneously ignite when they come into contact with each other. The two propellant components usually consist of a fuel and an oxidizer. The ...
with every known fuel, and so rapidly hypergolic that no ignition delay has ever been measured. It is also hypergolic with such things as cloth, wood, and test engineers, not to mention
asbestos Asbestos ( ) is a group of naturally occurring, Toxicity, toxic, carcinogenic and fibrous silicate minerals. There are six types, all of which are composed of long and thin fibrous Crystal habit, crystals, each fibre (particulate with length su ...
, sand, and water—with which it reacts explosively. It can be kept in some of the ordinary structural metals—steel, copper, aluminum, etc.—because of the formation of a thin film of insoluble metal fluoride that protects the bulk of the metal, just as the invisible coat of oxide on aluminium keeps it from burning up in the atmosphere. If, however, this coat is melted or scrubbed off, and has no chance to reform, the operator is confronted with the problem of coping with a metal-fluorine fire. For dealing with this situation, I have always recommended a good pair of running shoes.
Chlorine pentafluoride (ClF5) has also been investigated as a potential rocket oxidizer. It offered improved
specific impulse Specific impulse (usually abbreviated ) is a measure of how efficiently a reaction mass engine, such as a rocket engine, rocket using propellant or a jet engine using fuel, generates thrust. In general, this is a ratio of the ''Impulse (physics), ...
over chlorine trifluoride, but with all of the same difficulties in handling. Neither compound has been used in any operational rocket propulsion system. Under the
code name A code name, codename, call sign, or cryptonym is a code word or name used, sometimes clandestinely, to refer to another name, word, project, or person. Code names are often used for military purposes, or in espionage. They may also be used in ...
N- Stoff ("substance N"), chlorine trifluoride was investigated for military applications by the
Kaiser Wilhelm Institute The Kaiser Wilhelm Society for the Advancement of Science () was a German scientific institution established in the German Empire in 1911. Its functions were taken over by the Max Planck Society. The Kaiser Wilhelm Society was an umbrella organi ...
in
Nazi Germany Nazi Germany, officially known as the German Reich and later the Greater German Reich, was the German Reich, German state between 1933 and 1945, when Adolf Hitler and the Nazi Party controlled the country, transforming it into a Totalit ...
not long before the start of
World War II World War II or the Second World War (1 September 1939 – 2 September 1945) was a World war, global conflict between two coalitions: the Allies of World War II, Allies and the Axis powers. World War II by country, Nearly all of the wo ...
. Tests were made against mock-ups of the
Maginot Line The Maginot Line (; ), named after the Minister of War (France), French Minister of War André Maginot, is a line of concrete fortifications, obstacles and weapon installations built by French Third Republic, France in the 1930s to deter invas ...
fortifications, and it was found to be an extremely effective incendiary weapon and
poison gas Many gases have toxic properties, which are often assessed using the LC50 (median lethal concentration) measure. In the United States, many of these gases have been assigned an NFPA 704 health rating of 4 (may be fatal) or 3 (may cause serious ...
. From 1938, construction commenced on a partly bunkered, partly subterranean munitions factory, the Falkenhagen industrial complex, which was intended to produce 90
tonne The tonne ( or ; symbol: t) is a unit of mass equal to 1,000  kilograms. It is a non-SI unit accepted for use with SI. It is also referred to as a metric ton in the United States to distinguish it from the non-metric units of the s ...
s of N-Stoff per month, in addition to
sarin Sarin (NATO designation GB nerve_agent#G-series.html" ;"title="hort for nerve agent#G-series">G-series, "B" is an extremely toxic organophosphorus compound.nerve agent Nerve agents, sometimes also called nerve gases, are a class of organic chemistry, organic chemicals that disrupt the mechanisms by which nerves transfer messages to organs. The disruption is caused by the blocking of acetylcholinesterase (ACh ...
). However, by the time it was captured by the advancing
Red Army The Workers' and Peasants' Red Army, often shortened to the Red Army, was the army and air force of the Russian Soviet Republic and, from 1922, the Soviet Union. The army was established in January 1918 by a decree of the Council of People ...
in 1945, the factory had produced only about 30 to 50 tonnes, at a cost of over 100 German Reichsmarks per kilogram. N-Stoff was never used in war.


Hazards

is a very strong
oxidizer An oxidizing agent (also known as an oxidant, oxidizer, electron recipient, or electron acceptor) is a substance in a redox chemical reaction that gains or " accepts"/"receives" an electron from a (called the , , or ''electron donor''). In ot ...
. It is extremely reactive with most inorganic and organic materials and will combust many otherwise non-flammable materials without any ignition source. These reactions are often violent and in some cases
explosive An explosive (or explosive material) is a reactive substance that contains a great amount of potential energy that can produce an explosion if released suddenly, usually accompanied by the production of light, heat, sound, and pressure. An ex ...
.
Steel Steel is an alloy of iron and carbon that demonstrates improved mechanical properties compared to the pure form of iron. Due to steel's high Young's modulus, elastic modulus, Yield (engineering), yield strength, Fracture, fracture strength a ...
,
copper Copper is a chemical element; it has symbol Cu (from Latin ) and atomic number 29. It is a soft, malleable, and ductile metal with very high thermal and electrical conductivity. A freshly exposed surface of pure copper has a pinkish-orang ...
, and
nickel Nickel is a chemical element; it has symbol Ni and atomic number 28. It is a silvery-white lustrous metal with a slight golden tinge. Nickel is a hard and ductile transition metal. Pure nickel is chemically reactive, but large pieces are slo ...
are not consumed because a passivation layer of metal fluoride will form which prevents further corrosion, but
molybdenum Molybdenum is a chemical element; it has Symbol (chemistry), symbol Mo (from Neo-Latin ''molybdaenum'') and atomic number 42. The name derived from Ancient Greek ', meaning lead, since its ores were confused with lead ores. Molybdenum minerals hav ...
,
tungsten Tungsten (also called wolfram) is a chemical element; it has symbol W and atomic number 74. It is a metal found naturally on Earth almost exclusively in compounds with other elements. It was identified as a distinct element in 1781 and first ...
, and
titanium Titanium is a chemical element; it has symbol Ti and atomic number 22. Found in nature only as an oxide, it can be reduced to produce a lustrous transition metal with a silver color, low density, and high strength, resistant to corrosion in ...
are unsuitable as their fluorides are volatile. will quickly corrode even
noble metals A noble metal is ordinarily regarded as a metallic element that is generally resistant to corrosion and is usually found in nature in its raw form. Gold, platinum, and the other platinum group metals (ruthenium, rhodium, palladium, osmium, i ...
like iridium, platinum, or gold, oxidizing them to chlorides and fluorides. This
oxidizing Redox ( , , reduction–oxidation or oxidation–reduction) is a type of chemical reaction in which the oxidation states of the reactants change. Oxidation is the loss of electrons or an increase in the oxidation state, while reduction is ...
power, surpassing that of oxygen, causes to react vigorously with many other materials often thought of as incombustible and refractory. It ignites sand,
asbestos Asbestos ( ) is a group of naturally occurring, Toxicity, toxic, carcinogenic and fibrous silicate minerals. There are six types, all of which are composed of long and thin fibrous Crystal habit, crystals, each fibre (particulate with length su ...
, glass, and even ashes of substances that have already burned in oxygen. In one particular industrial accident, a spill of 900 kg of burned through 30 cm of concrete and 90 cm of gravel beneath. There is exactly one known fire control/suppression method capable of dealing with flooding the fire with nitrogen or
noble gases The noble gases (historically the inert gases, sometimes referred to as aerogens) are the members of group 18 of the periodic table: helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), radon (Rn) and, in some cases, oganesson (Og) ...
such as
argon Argon is a chemical element; it has symbol Ar and atomic number 18. It is in group 18 of the periodic table and is a noble gas. Argon is the third most abundant gas in Earth's atmosphere, at 0.934% (9340 ppmv). It is more than twice as abu ...
. Barring that, the area must simply be kept cool until the reaction ceases. The compound reacts with water-based suppressors and CO2, rendering them counterproductive. Exposure to larger amounts of , as a liquid or as a gas, ignites living tissue, resulting in severe
chemical A chemical substance is a unique form of matter with constant chemical composition and characteristic properties. Chemical substances may take the form of a single element or chemical compounds. If two or more chemical substances can be combin ...
and thermal burns. reacts violently with water and exposure to the reaction also results in burns. The products of hydrolysis are mainly
hydrofluoric acid Hydrofluoric acid is a solution of hydrogen fluoride (HF) in water. Solutions of HF are colorless, acidic and highly corrosive. A common concentration is 49% (48–52%) but there are also stronger solutions (e.g. 70%) and pure HF has a boiling p ...
and
hydrochloric acid Hydrochloric acid, also known as muriatic acid or spirits of salt, is an aqueous solution of hydrogen chloride (HCl). It is a colorless solution with a distinctive pungency, pungent smell. It is classified as a acid strength, strong acid. It is ...
, which are usually released as steam or vapor due to the highly exothermic nature of the reaction, and these substances present hazards of their own.


See also

* Chlorine fluoride * Dioxygen difluoride *
List of stoffs During World War II, Germany fielded many aircraft and rockets whose fuels, and oxidizers, were designated (letter)-''Stoff'' (). The following list of stoffs refers to the World War II aerospace meanings if not noted otherwise. Meaning of ''st ...


Explanatory notes

Using data from Economic History Services and The Inflation Calculator it can be calculated that the sum of 100 Reichsmarks in 1941 is approximately equivalent to US$4,652.50 in 2021. Reichsmark exchange rate values from 1942 to 1944 are fragmentary.


References


Further reading

* * * * * * *


External links


National Pollutant Inventory – Fluoride and compounds fact sheet

NIST Standard Reference Database


* ttp://www.webelements.com/ WebElements
Sand Won't Save You This Time
blog post by Derek Lowe on the hazards of handling

{{Fluorine compounds Chlorine(III) compounds Fluorides Fluorinating agents Incendiary weapons Inorganic chlorine compounds Interhalogen compounds Oxidizing agents Rocket oxidizers Substances discovered in the 1930s