In
semiconductor device fabrication
Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuit (IC) chips such as modern computer processors, microcontrollers, and memory chips such as NAND flash and DRAM that are pres ...
, channel-stopper or channel-stop is an area in semiconductor devices produced by
implantation or
diffusion
Diffusion is the net movement of anything (for example, atoms, ions, molecules, energy) generally from a region of higher concentration to a region of lower concentration. Diffusion is driven by a gradient in Gibbs free energy or chemical p ...
of
ion
An ion () is an atom or molecule with a net electrical charge.
The charge of an electron is considered to be negative by convention and this charge is equal and opposite to the charge of a proton, which is considered to be positive by conven ...
s, by growing or patterning the
silicon oxide Silicon oxide may refer to either of the following:
*Silicon dioxide
Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many part ...
, or other isolation methods in semiconductor material with the primary function to limit the spread of the
channel area or to prevent the formation of
parasitic channels (
inversion layers).
[" Smart Power ICs", by Bruno Murari, Franco Bertotti, Giovanni A. Vignola, Antonio Andreini, 2002, , ]
pp. 47, 47
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References
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Semiconductor device fabrication