A field-effect transistor-based biosensor, also known as a biosensor field-effect transistor (Bio-FET
or BioFET), field-effect biosensor (FEB),
[
] or biosensor MOSFET,
is a
field-effect transistor
The field-effect transistor (FET) is a type of transistor that uses an electric field to control the current through a semiconductor. It comes in two types: junction FET (JFET) and metal-oxide-semiconductor FET (MOSFET). FETs have three termi ...
(based on the
MOSFET
upright=1.3, Two power MOSFETs in amperes">A in the ''on'' state, dissipating up to about 100 watt">W and controlling a load of over 2000 W. A matchstick is pictured for scale.
In electronics, the metal–oxide–semiconductor field- ...
structure)
that is gated by changes in the surface potential induced by the binding of
molecules
A molecule is a group of two or more atoms that are held together by attractive forces known as chemical bonds; depending on context, the term may or may not include ions that satisfy this criterion. In quantum physics, organic chemistry ...
. When charged molecules, such as
biomolecules
A biomolecule or biological molecule is loosely defined as a molecule produced by a living organism and essential to one or more typically biological processes. Biomolecules include large macromolecules such as proteins, carbohydrates, lipi ...
, bind to the FET gate, which is usually a
dielectric
In electromagnetism, a dielectric (or dielectric medium) is an Insulator (electricity), electrical insulator that can be Polarisability, polarised by an applied electric field. When a dielectric material is placed in an electric field, electric ...
material, they can change the charge distribution of the underlying
semiconductor
A semiconductor is a material with electrical conductivity between that of a conductor and an insulator. Its conductivity can be modified by adding impurities (" doping") to its crystal structure. When two regions with different doping level ...
material resulting in a change in conductance of the FET channel.
A Bio-FET consists of two main compartments: one is the biological recognition element and the other is the field-effect transistor.
The BioFET structure is largely based on the
ion-sensitive field-effect transistor (ISFET), a type of
metal–oxide–semiconductor field-effect transistor
upright=1.3, Two power MOSFETs in amperes">A in the ''on'' state, dissipating up to about 100 watt">W and controlling a load of over 2000 W. A matchstick is pictured for scale.
In electronics, the metal–oxide–semiconductor field- ...
(MOSFET) where the
metal gate
A metal gate, in the context of a lateral metal–oxide–semiconductor (MOS) stack, is the gate electrode separated by an oxide from the transistor's channel – the gate material is made from a metal. In most MOS transistors since about the mid- ...
is replaced by an
ion
An ion () is an atom or molecule with a net electrical charge. The charge of an electron is considered to be negative by convention and this charge is equal and opposite to the charge of a proton, which is considered to be positive by convent ...
-sensitive
membrane
A membrane is a selective barrier; it allows some things to pass through but stops others. Such things may be molecules, ions, or other small particles. Membranes can be generally classified into synthetic membranes and biological membranes. Bi ...
,
electrolyte
An electrolyte is a substance that conducts electricity through the movement of ions, but not through the movement of electrons. This includes most soluble Salt (chemistry), salts, acids, and Base (chemistry), bases, dissolved in a polar solven ...
solution, and
reference electrode.
Mechanism of operation
Bio-FETs couple a
transistor
A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch electrical signals and electric power, power. It is one of the basic building blocks of modern electronics. It is composed of semicondu ...
device with a bio-sensitive layer that can specifically detect bio-molecules such as nucleic acids and proteins. A Bio-FET system consists of a semiconducting
field-effect transistor
The field-effect transistor (FET) is a type of transistor that uses an electric field to control the current through a semiconductor. It comes in two types: junction FET (JFET) and metal-oxide-semiconductor FET (MOSFET). FETs have three termi ...
that acts as a
transducer
A transducer is a device that Energy transformation, converts energy from one form to another. Usually a transducer converts a signal in one form of energy to a signal in another.
Transducers are often employed at the boundaries of automation, M ...
separated by an insulator layer (e.g.
SiO2) from the biological recognition element (e.g. receptors or probe molecules) which are selective to the target molecule called analyte.
[Alena Bulyha, Clemens Heitzinger and Norbert J Mauser: Bio-Sensors: Modelling and Simulation of Biologically Sensitive Field-Effect-Transistors, ERCIM News, 04,2011.] Once the analyte binds to the recognition element, the charge distribution at the surface changes with a corresponding change in the electrostatic surface potential of the semiconductor. This change in the surface potential of the semiconductor acts like a gate voltage would in a traditional
MOSFET
upright=1.3, Two power MOSFETs in amperes">A in the ''on'' state, dissipating up to about 100 watt">W and controlling a load of over 2000 W. A matchstick is pictured for scale.
In electronics, the metal–oxide–semiconductor field- ...
, i.e. changing the amount of current that can flow between the source and drain electrodes.
This change in current (or
conductance) can be measured, thus the binding of the analyte can be detected. The precise relationship between the current and analyte concentration depends upon the
region of transistor operation.
Fabrication of Bio-FET
The fabrication of Bio-FET system consists of several steps as follows:
# Finding a substrate suitable for serving as a FET site, and forming a FET on the substrate,
# Exposing an active site of the FET from the substrate,
# Providing a sensing film layer on active site of FET,
# Providing a receptor on the sensing film layer in order to be used for ion detection,
# Removing a semiconductor layer, and thinning a dielectric layer,
# Etching the remaining portion of the dielectric layer to expose an active site of the FET,
# Removing the photoresist, and depositing a sensing film layer followed by formation of a photoresist pattern on the sensing film,
# Etching the unprotected portion of the sensing film layer, and removing the photoresist
[Yuji Miyahara, Toshiya Sakata, Akira Matsumoto: Microbio genetic analysis based on Field Effect Transistors, Principles of Bacterial Detection: Biosensors, Recognition Receptors and Microsystems.]
Advantages
The principle of operation of Bio-FET devices based on detecting changes in electrostatic potential due to binding of analyte. This the same mechanism of operation as
glass electrode
A glass electrode is a type of ion-selective electrode made of a doped glass membrane that is sensitive to a specific ion. The most common application of ion-selective glass electrodes is for the measurement of pH. The pH electrode is an exampl ...
sensors which also detect changes in surface potential but were developed as early as the 1920s. Due to the small magnitude of the changes in surface potential upon binding of biomolecules or changing pH, glass electrodes require a high impedance amplifier which increases the size and cost of the device. In contrast, the advantage of Bio-FET devices is that they operate as an intrinsic amplifier, converting small changes in surface potential to large changes in current (through the transistor component) without the need for additional circuitry. This means BioFETs have the capability to be much smaller and more affordable than glass electrode-based
biosensor
A biosensor is an analytical device, used for the detection of a chemical substance, that combines a biological component with a physicochemical detector.
The ''sensitive biological element'', e.g. tissue, microorganisms, organelles, cell rece ...
s. If the transistor is operated in the
subthreshold region, then an exponential increase in current is expected for a unit change in surface potential.
Bio-FETs can be used for detection in fields such as
medical diagnostics,
biological research,
environmental protection
Environmental protection, or environment protection, refers to the taking of measures to protecting the natural environment, prevent pollution and maintain ecological balance. Action may be taken by individuals, advocacy groups and governments. ...
and food analysis. Conventional measurements like optical, spectrometric, electrochemical, and SPR measurements can also be used to analyze biological molecules. Nevertheless, these conventional methods are relatively time-consuming and expensive, involving multi-stage processes and also not compatible to real-time monitoring,
[K.Y.Park, M.S.Kim, K.M.Park, and S.Y.Choi: Fabrication of BioFET sensor for simultaneous detection of protein and DNA, Electrochem.org.] in contrast to Bio-FETs. Bio-FETs are low weight, low cost of mass production, small size and compatible with commercial planar processes for large-scale circuitry. They can be easily integrated into digital microfluidic devices for
Lab-on-a-chip
A lab-on-a-chip (LOC) is a device that integrates one or several laboratory functions on a single integrated circuit (commonly called a "chip") of only millimeters to a few square centimeters to achieve automation and high-throughput screening. ...
. For example, a microfluidic device can control sample droplet transport whilst enabling detection of bio-molecules,
signal processing
Signal processing is an electrical engineering subfield that focuses on analyzing, modifying and synthesizing ''signals'', such as audio signal processing, sound, image processing, images, Scalar potential, potential fields, Seismic tomograph ...
, and the data transmission, using an
all-in-one chip. Bio-FET also does not require any labeling step,
and simply utilise a specific molecular (e.g. antibody, ssDNA) on the sensor surface to provide selectivity. Some Bio-FETs display fascinating electronic and optical properties. An example FET would is a glucose-sensitive based on the modification of the gate surface of ISFET with SiO
2 nanoparticles and the enzyme glucose oxidase (GOD); this device showed obviously enhanced sensitivity and extended lifetime compared with that without SiO
2 nanoparticles.
Optimization
The choice of reference electrode (liquid gate) or back-gate voltage determines the carrier concentration within the field effect transistor, and therefore its region of operation, therefore the response of the device can be optimised by tuning the gate voltage. If the transistor is operated in the
subthreshold region then an exponential increase in current is expected for a unit change in surface potential. The response is often reported as the change in current on analyte binding divided by the initial current (
), and this value is always maximal in the subthreshold region of operation due to this exponential amplification.
For most devices, optimum signal-to-noise, defined as change in current divided by the baseline noise, (
) is also obtained when operating in the subthreshold region,
however as the noise sources vary between devices, this is device dependent.
One optimization of Bio-FET may be to put a hydrophobic passivation surface on the source and the drain to reduce non-specific biomolecular binding to regions which are not the sensing-surface. Many other optimisation strategies have been reviewed in the literature.
History
The
MOSFET
upright=1.3, Two power MOSFETs in amperes">A in the ''on'' state, dissipating up to about 100 watt">W and controlling a load of over 2000 W. A matchstick is pictured for scale.
In electronics, the metal–oxide–semiconductor field- ...
was invented at Bell Labs between 1959 and 1960.
In 1962,
Leland C. Clark
Leland C. Clark Jr. (December 4, 1918 – September 25, 2005) was an American biochemist born in Rochester, New York. He is most well known as the inventor of the Clark electrode, a device used for measuring oxygen in blood, water and other liquid ...
and Champ Lyons invented the first
biosensor
A biosensor is an analytical device, used for the detection of a chemical substance, that combines a biological component with a physicochemical detector.
The ''sensitive biological element'', e.g. tissue, microorganisms, organelles, cell rece ...
.
Biosensor MOSFETs (BioFETs) were later developed, and they have since been widely used to measure
physical,
chemical
A chemical substance is a unique form of matter with constant chemical composition and characteristic properties. Chemical substances may take the form of a single element or chemical compounds. If two or more chemical substances can be combin ...
,
biological
Biology is the scientific study of life and living organisms. It is a broad natural science that encompasses a wide range of fields and unifying principles that explain the structure, function, growth, origin, evolution, and distribution of ...
and
environmental parameters.
The first BioFET was the
ion-sensitive field-effect transistor (ISFET), invented by
Piet Bergveld for
electrochemical
Electrochemistry is the branch of physical chemistry concerned with the relationship between electrical potential difference and identifiable chemical change. These reactions involve electrons moving via an electronically conducting phase (typi ...
and
biological
Biology is the scientific study of life and living organisms. It is a broad natural science that encompasses a wide range of fields and unifying principles that explain the structure, function, growth, origin, evolution, and distribution of ...
applications in 1970.
Other early BioFETs include the
adsorption
Adsorption is the adhesion of atoms, ions or molecules from a gas, liquid or dissolved solid to a surface. This process creates a film of the ''adsorbate'' on the surface of the ''adsorbent''. This process differs from absorption, in which a ...
FET (ADFET)
patented
A patent is a type of intellectual property that gives its owner the legal right to exclude others from making, using, or selling an invention for a limited period of time in exchange for publishing an enabling disclosure of the invention."A ...
by P.F. Cox in 1974, and a
hydrogen
Hydrogen is a chemical element; it has chemical symbol, symbol H and atomic number 1. It is the lightest and abundance of the chemical elements, most abundant chemical element in the universe, constituting about 75% of all baryon, normal matter ...
-sensitive MOSFET demonstrated by I. Lundstrom, M.S. Shivaraman, C.S. Svenson and L. Lundkvist in 1975.
The ISFET is a special type of MOSFET with a gate at a certain distance,
and where the
metal gate
A metal gate, in the context of a lateral metal–oxide–semiconductor (MOS) stack, is the gate electrode separated by an oxide from the transistor's channel – the gate material is made from a metal. In most MOS transistors since about the mid- ...
is replaced by an
ion
An ion () is an atom or molecule with a net electrical charge. The charge of an electron is considered to be negative by convention and this charge is equal and opposite to the charge of a proton, which is considered to be positive by convent ...
-sensitive
membrane
A membrane is a selective barrier; it allows some things to pass through but stops others. Such things may be molecules, ions, or other small particles. Membranes can be generally classified into synthetic membranes and biological membranes. Bi ...
,
electrolyte
An electrolyte is a substance that conducts electricity through the movement of ions, but not through the movement of electrons. This includes most soluble Salt (chemistry), salts, acids, and Base (chemistry), bases, dissolved in a polar solven ...
solution and
reference electrode.
The ISFET is widely used in
biomedical
Biomedicine (also referred to as Western medicine, mainstream medicine or conventional medicine) applications, such as the detection of
DNA hybridization,
biomarker
In biomedical contexts, a biomarker, or biological marker, is a measurable indicator of some biological state or condition. Biomarkers are often measured and evaluated using blood, urine, or soft tissues to examine normal biological processes, ...
detection from
blood
Blood is a body fluid in the circulatory system of humans and other vertebrates that delivers necessary substances such as nutrients and oxygen to the cells, and transports metabolic waste products away from those same cells.
Blood is com ...
,
antibody
An antibody (Ab) or immunoglobulin (Ig) is a large, Y-shaped protein belonging to the immunoglobulin superfamily which is used by the immune system to identify and neutralize antigens such as pathogenic bacteria, bacteria and viruses, includin ...
detection,
glucose
Glucose is a sugar with the Chemical formula#Molecular formula, molecular formula , which is often abbreviated as Glc. It is overall the most abundant monosaccharide, a subcategory of carbohydrates. It is mainly made by plants and most algae d ...
measurement,
pH sensing, and
genetic technology.
By the mid-1980s, other BioFETs had been developed, including the
gas sensor
A gas detector is a device that detects the presence of gases in a volume of space, often as part of a safety system. A gas detector can sound an alarm to operators in the area where the leak is occurring, giving them the opportunity to leave. Th ...
FET (GASFET),
pressure sensor
Pressure measurement is the measurement of an applied force by a fluid (liquid or gas) on a surface. Pressure is typically measured in units of force per unit of surface area. Many techniques have been developed for the measurement of pressur ...
FET (PRESSFET),
chemical field-effect transistor
A ChemFET is a chemically-sensitive field-effect transistor, that is a field-effect transistor used as a sensor for measuring chemical concentrations in chemical solution, solution. When the target analyte concentration changes, the current through ...
(ChemFET),
reference ISFET (REFET), enzyme-modified FET (ENFET) and immunologically modified FET (IMFET).
By the early 2000s, BioFETs such as the
DNA field-effect transistor A DNA field-effect transistor (DNAFET) is a field-effect transistor which uses the field-effect due to the partial charges of DNA molecules to function as a biosensor. The structure of DNAFETs is similar to that of MOSFETs, with the exception of th ...
(DNAFET),
gene-modified FET (GenFET), and
cell-potential BioFET (CPFET) had been developed.
Current research in this area has produced new formations of the BioFET such as the Organic Electrolyte Gated FET (OEGFET).
See also
*
ChemFET: chemically sensitive field-effect transistor
*
ISFET: ion-sensitive field-effect transistor
References
{{Electronic components
Biosensors
Field-effect transistors
MOSFETs
Transistor types