1-methoxy-2-propanol Acetate
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Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type
glycol ether Glycol ethers are a class of chemical compounds consisting of alkyl ethers that are based on glycols such as ethylene glycol or propylene glycol. They are commonly used as solvents in paints and cleaners. They have good solvent properties while ha ...
used in inks, coatings, and cleaners. It is sold by
Dow Chemical The Dow Chemical Company is an American multinational corporation headquartered in Midland, Michigan, United States. The company was among the three largest chemical producers in the world in 2021. It is the operating subsidiary of Dow Inc., ...
under the name Dowanol PMA, by Shell Chemical under the name methyl proxitol acetate, and by Eastman under the name PM Acetate. In the semiconductor industry, PGMEA is a commonly used
solvent A solvent (from the Latin language, Latin ''wikt:solvo#Latin, solvō'', "loosen, untie, solve") is a substance that dissolves a solute, resulting in a Solution (chemistry), solution. A solvent is usually a liquid but can also be a solid, a gas ...
, primarily for the application of surface adherents such as
Bis(trimethylsilyl)amine Bis(trimethylsilyl)amine (also known as hexamethyldisilazane and HMDS) is an organosilicon compound with the molecular formula CH3)3Sisub>2NH. The molecule is a derivative of ammonia with trimethylsilyl groups in place of two hydrogen atoms. An ...
(HMDS) on
silicon wafer In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si, silicium), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The ...
s. The compound is often the most abundant airborne, molecular
contamination Contamination is the presence of a constituent, impurity, or some other undesirable element that renders something unsuitable, unfit or harmful for the physical body, natural environment, workplace, etc. Types of contamination Within the scien ...
(AMC) in semiconductor cleanrooms, due to its evaporation into ambient air.


References

{{reflist Glycol ethers Acetate esters