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Dichlorosilane
Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH3 (i.e. 16:1), usually results in lower stress nitride films. History Dichlorosilane was originally prepared by Stock and Somieski by the reaction of SiH4 with hydrogen chloride. Dichlorosilane reacts with water vapor to initially give monomeric prosiloxane: Monomeric polymerizes rapidly upon condensation or in solution.Seyferth, D., Prud'Homme, C., Wiseman, G., Cyclic Polysiloxanes from the Hydrolysis of Dichlorosilane, Inorganic Chemistry, 22, 2163-2167 Reactions and formation Most dichlorosilane results as a byproduct of the reaction of HCl with silicon, a reaction intended to give trichlorosilane. Disproportionation In chemistry, disproportionation, sometimes called dismutation, is a redox reaction in which one compound ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Trichlorosilane
Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds. Production Trichlorosilane is produced by treating powdered metallurgical grade silicon with blowing hydrogen chloride at 300 °C in a hydrochlorination process. Hydrogen is also produced, as described in the chemical equation: :Si + 3 HCl → HCl3Si + H2 Yields of 80-90% can be achieved. The main byproducts are silicon tetrachloride (chemical formula SiCl4), hexachlorodisilane (Si2Cl6) and dichlorosilane (H2SiCl2), from which trichlorosilane can be separated by distillation. It is also produced from silicon tetrachloride in a dir ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Silicon Tetrachloride
Silicon tetrachloride or tetrachlorosilane is the inorganic compound with the formula SiCl4. It is a colorless volatile liquid that fumes in air. It is used to produce high purity silicon and silica for commercial applications. It is a part of the chlorosilane family. Preparation Silicon tetrachloride is prepared by the chlorination of various silicon compounds such as ferrosilicon, silicon carbide, or mixtures of silicon dioxide and carbon. The ferrosilicon route is most common. In the laboratory, can be prepared by treating silicon with chlorine at : : It was first prepared by Jöns Jakob Berzelius in 1823. Brine can be contaminated with silica when the production of chlorine is a byproduct of a metal refining process from metal chloride ore. In rare occurrences, the silicon dioxide in silica is converted to silicon tetrachloride when the contaminated brine is electrolyzed. Reactions Hydrolysis and related reactions Like other chlorosilanes or silanes, silicon tetrachl ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Trichlorosilane
Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds. Production Trichlorosilane is produced by treating powdered metallurgical grade silicon with blowing hydrogen chloride at 300 °C in a hydrochlorination process. Hydrogen is also produced, as described in the chemical equation: :Si + 3 HCl → HCl3Si + H2 Yields of 80-90% can be achieved. The main byproducts are silicon tetrachloride (chemical formula SiCl4), hexachlorodisilane (Si2Cl6) and dichlorosilane (H2SiCl2), from which trichlorosilane can be separated by distillation. It is also produced from silicon tetrachloride in a dir ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Disproportionation
In chemistry, disproportionation, sometimes called dismutation, is a redox reaction in which one compound of intermediate oxidation state converts to two compounds, one of higher and one of lower oxidation state. The reverse of disproportionation, such as when a compound in an intermediate oxidation state is formed from precursors of lower and higher oxidation states, is called ''comproportionation'', also known as ''symproportionation''. More generally, the term can be applied to any desymmetrizing reaction where two molecules of one type react to give one each of two different types: : This expanded definition is not limited to redox reactions, but also includes some molecular autoionization reactions, such as the self-ionization of water. In contrast, some authors use the term ''redistribution'' to refer to reactions of this type (in either direction) when only ligand exchange but no redox is involved and distinguish such processes from disproportionation and comproportionati ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Chlorosilane
In inorganic chemistry, chlorosilanes are a group of reactive, chlorine-containing chemical compounds, related to silane () and used in many chemical processes. Each such chemical has at least one silicon-chlorine () bond. Trichlorosilane is produced on the largest scale. The parent chlorosilane is silicon tetrachloride (). Synthesis Hydrochlorosilanes These include chlorosilane , dichlorosilane , and, most importantly trichlorosilane . The idealized equation for the production of trichlorosilane is: : Methylchlorosilanes Methyltrichlorosilane , dimethyldichlorosilane , and trimethylsilyl chloride are produced by the Direct Process, the reaction of methyl chloride with a silicon-copper alloy. Each of these three methylchlorosilanes are common reagents in organosilicon chemistry. Reactions The methylchlorosilanes react with water to produce hydrogen chloride, giving siloxanes. In the case of trimethylsilyl chloride, the hydrolyzed product is hexamethyldisiloxane: : The ana ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Dichloromethane
Dichloromethane (DCM, methylene chloride, or methylene bichloride) is an organochlorine compound with the formula . This colorless, volatile liquid with a chloroform-like, sweet odor is widely used as a solvent. Although it is not miscible with water, it is slightly polar, and miscible with many organic solvents.Rossberg, M. ''et al.'' (2006) "Chlorinated Hydrocarbons" in Ullmann's Encyclopedia of Industrial Chemistry, Wiley-VCH, Weinheim. . Occurrence Natural sources of dichloromethane include oceanic sources, macroalgae, wetlands, and volcanoes. However, the majority of dichloromethane in the environment is the result of industrial emissions. Production DCM is produced by treating either chloromethane or methane with chlorine gas at 400–500 °C. At these temperatures, both methane and chloromethane undergo a series of reactions producing progressively more chlorinated products. In this way, an estimated 400,000 tons were produced in the US, Europe, and Japan in 199 ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Ammonia
Ammonia is an inorganic chemical compound of nitrogen and hydrogen with the chemical formula, formula . A Binary compounds of hydrogen, stable binary hydride and the simplest pnictogen hydride, ammonia is a colourless gas with a distinctive pungent smell. It is widely used in fertilizers, refrigerants, explosives, cleaning agents, and is a precursor for numeous chemicals. Biologically, it is a common nitrogenous waste, and it contributes significantly to the nutritional needs of terrestrial organisms by serving as a precursor to fertilisers. Around 70% of ammonia produced industrially is used to make fertilisers in various forms and composition, such as urea and diammonium phosphate. Ammonia in pure form is also applied directly into the soil. Ammonia, either directly or indirectly, is also a building block for the synthesis of many chemicals. In many countries, it is classified as an List of extremely hazardous substances, extremely hazardous substance. Ammonia is toxic, cau ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
LPCVD
Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber. Microfabrication processes widely use CVD to deposit materials in various forms, including: monocrystalline, polycrystalline, amorphous, and epitaxial. These materials include: silicon ( dioxide, carbide, nitride, oxynitride), carbon (fiber, nanofibers, nanotubes, diamond and graphene), fluorocarbons, filaments, tungsten, titanium nitride and various high-κ dielectrics. The term ''chemical vapour deposition'' was coined in 1960 by ''John M. Blocher, Jr.'' who intended to differentiate ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Stress (physics)
In continuum mechanics, stress is a physical quantity that describes Force, forces present during Deformation (physics), deformation. For example, an object being pulled apart, such as a stretched elastic band, is subject to Tension (physics), ''tensile'' stress and may undergo Elongation (materials science), elongation. An object being pushed together, such as a crumpled sponge, is subject to Compression (physics), ''compressive'' stress and may undergo shortening. The greater the force and the smaller the cross-sectional area of the body on which it acts, the greater the stress. Stress has Dimension (physics), dimension of force per area, with SI Units, SI units of newtons per square meter (N/m2) or Pascal (unit), pascal (Pa). Stress expresses the internal forces that neighbouring particles of a continuous material exert on each other, while Strain (mechanics), ''strain'' is the measure of the relative deformation (mechanics), deformation of the material. For example, when a ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Monosilane
Silane (Silicane) is an inorganic compound with chemical formula . It is a colorless, pyrophoric gas with a sharp, repulsive, pungent smell, somewhat similar to that of acetic acid. Silane is of practical interest as a precursor to elemental silicon. Silanes with alkyl groups are effective water repellents for mineral surfaces such as concrete and masonry. Silanes with both organic and inorganic attachments are used as coupling agents. They are commonly used to apply coatings to surfaces or as an adhesion promoter. Production Commercial-scale routes Silane can be produced by several routes. Typically, it arises from the reaction of hydrogen chloride with magnesium silicide: : It is also prepared from metallurgical-grade silicon in a two-step process. First, silicon is treated with hydrogen chloride at about 300 °C to produce trichlorosilane, HSiCl3, along with hydrogen gas, according to the chemical equation : The trichlorosilane is then converted to a mixture of sil ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Hydrogen Chloride
The Chemical compound, compound hydrogen chloride has the chemical formula and as such is a hydrogen halide. At room temperature, it is a colorless gas, which forms white fumes of hydrochloric acid upon contact with atmospheric water vapor. Hydrogen chloride gas and hydrochloric acid are important in technology and industry. Hydrochloric acid, the aqueous solution of hydrogen chloride, is also commonly given the formula HCl. Reactions Hydrogen chloride is a diatomic molecule, consisting of a hydrogen atom H and a chlorine atom Cl connected by a Polar-covalent bond, polar covalent bond. The chlorine atom is much more Electronegativity, electronegative than the hydrogen atom, which makes this bond polar. Consequently, the molecule has a large Molecular dipole moment, dipole moment with a negative partial charge (δ−) at the chlorine atom and a positive partial charge (δ+) at the hydrogen atom. In part because of its high polarity, HCl is very soluble in water (and in other ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
