The ''Journal of Vacuum Science and Technology'' is a peer-reviewed scientific journal published in two parts, ''A'' and ''B'', by the

American Institute of Physics The American Institute of Physics (AIP) promotes science and the profession of physics, publishes physics journals, and produces publications for scientific and engineering societies. The AIP is made up of various member societies. Its corpora ...

on behalf of the

American Vacuum Society AVS: Science and Technology of Materials, Interfaces, and ProcessingAIP: A Federation of the Physical Sciences

. It was established in 1964 and the

editor-in-chief An editor-in-chief (EIC), also known as lead editor or chief editor, is a publication's editorial leader who has final responsibility for its operations and policies. The highest-ranking editor of a publication may also be titled editor, managing ...

is Eray Aydil (

University of Minnesota The University of Minnesota, formally the University of Minnesota, Twin Cities, (UMN Twin Cities, the U of M, or Minnesota) is a public land-grant research university in the Twin Cities of Minneapolis and Saint Paul, Minnesota, United States. ...

History

*1964–1982 ''Journal of Vacuum Science and Technology'' *1983–present ''Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films'' *1983–1990 ''Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena'' *1991–present ''Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures''

Part ''A''

Part ''A'' covers applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science,

thin films A thin film is a layer of material ranging from fractions of a nanometer ( monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many ...

vacuum metallurgy Vacuum metallurgy is the field of materials technology that deals with making, shaping, or treating metals in a controlled atmosphere, at pressures significantly less than normal atmospheric pressure.http://processmaterials.com/technology/vacuum-me ...

, and vacuum technology. According to the ''

Journal Citation Reports ''Journal Citation Reports'' (''JCR'') is an annual publicationby Clarivate Analytics (previously the intellectual property of Thomson Reuters). It has been integrated with the Web of Science and is accessed from the Web of Science-Core Collec ...

'', the journal has a 2015

impact factor The impact factor (IF) or journal impact factor (JIF) of an academic journal is a scientometric index calculated by Clarivate that reflects the yearly mean number of citations of articles published in the last two years in a given journal, as ...

of 1.724.

Part ''B''

Part ''B'' covers vacuum and

plasma processing Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface. Plasma processing techniques include: *Plasma activation * Plasma ashing *Plasma cleaning *Plasma electr ...

of various materials, their structural characterization,

microlithography Microlithography is a general name for any manufacturing process that can create a minutely patterned thin film of protective materials over a substrate, such as a silicon wafer, in order to protect selected areas of it during subsequent etchin ...

, and the physics and chemistry of submicrometer and nanometer structures and devices. According to the ''

'', the journal has a 2014

of 1.398.

References

External links

*{{Official website, http://scitation.aip.org/content/avs/journal/jvst Physics journals English-language journals Publications established in 1964 Bimonthly journals American Institute of Physics academic journals