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The cascaded arc is a wall-stabilized thermal
M.C.M. van de Sanden, G.J.H. Brussaard, W.M.M. Kessels, A. de Graaf, M.F.A.M. van Hest, K.G.Y. Letourneur and D.C. Schram is shown in the figure below. Compared to plasma sources in other linear plasma generators, this source can produce high-density argon and hydrogen plasmas (respectively 1021 – 1024 and 1019 – 1022 m−3) at a relatively low
A Glow Discharge Unit
HIGH BRIGHTNESS H- SURFACE PLASMA SOURCES
H- production in pure hydrogen discharges of surface-plasma sources
The cascaded arc is a wall-stabilized thermal electric arc
An electric arc, or arc discharge, is an electrical breakdown of a gas that produces a prolonged electrical discharge. The current through a normally nonconductive medium such as air produces a plasma; the plasma may produce visible light. An ...
discharge that produces a high density, low temperature plasma.
General
The cascaded arc source, developed at theEindhoven University of Technology
The Eindhoven University of Technology ( nl, Technische Universiteit Eindhoven), abbr. TU/e, is a public technical university in the Netherlands, located in the city of Eindhoven. In 2020–21, around 14,000 students were enrolled in its BSc an ...
,M.C.M. van de Sanden, G.J.H. Brussaard, W.M.M. Kessels, A. de Graaf, M.F.A.M. van Hest, K.G.Y. Letourneur and D.C. Schram is shown in the figure below. Compared to plasma sources in other linear plasma generators, this source can produce high-density argon and hydrogen plasmas (respectively 1021 – 1024 and 1019 – 1022 m−3) at a relatively low
electron temperature
Plasma parameters define various characteristics of a plasma, an electrically conductive collection of charged particles that responds ''collectively'' to electromagnetic forces. Plasma typically takes the form of neutral gas-like clouds or char ...
(~1 eV). Due to the high collision frequency of the particles in the source, the plasma is in thermal equilibrium and reasonably homogeneous.
The cascaded arc consists of a gas inlet, three tungsten
Tungsten, or wolfram, is a chemical element with the symbol W and atomic number 74. Tungsten is a rare metal found naturally on Earth almost exclusively as compounds with other elements. It was identified as a new element in 1781 and first isol ...
cathodes, cascaded plates, a nozzle and an anode. Via the gas inlet, the working gas -argon or hydrogen- can flow into the cathode chamber. The source is typically running at 0.5–3.0 slm ( – particles per second) and a discharge current of 100–300 A. The cascaded plates in between the cathode and anode are electrically insulated from each other by 1 mm thick Boron nitride
Boron nitride is a thermally and chemically resistant refractory compound of boron and nitrogen with the chemical formula BN. It exists in various crystalline forms that are isoelectronic to a similarly structured carbon lattice. The hexagonal ...
plates. The voltage
Voltage, also known as electric pressure, electric tension, or (electric) potential difference, is the difference in electric potential between two points. In a static electric field, it corresponds to the work needed per unit of charge to ...
of these plates is the floating potential. Both nozzle and anode are grounded.
See also
* * List of plasma (physics) articles *Plasma window The plasma window (not to be confused with a ''plasma shield'') is a technology that fills a volume of space with plasma confined by a magnetic field. With current technology, this volume is quite small and the plasma is generated as a flat plane ...
External links
A Glow Discharge Unit
HIGH BRIGHTNESS H- SURFACE PLASMA SOURCES
H- production in pure hydrogen discharges of surface-plasma sources
References
{{Reflist Plasma physics Electric arcs