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The 90  nm process refers to the level of MOSFET ( CMOS) fabrication process technology that was commercialized by the 2003–2005 timeframe, by leading semiconductor companies like
Toshiba , commonly known as Toshiba and stylized as TOSHIBA, is a Japanese multinational conglomerate corporation headquartered in Minato, Tokyo, Japan. Its diversified products and services include power, industrial and social infrastructure systems, ...
,
Sony , commonly stylized as SONY, is a Japanese multinational conglomerate corporation headquartered in Minato, Tokyo, Japan. As a major technology company, it operates as one of the world's largest manufacturers of consumer and professiona ...
,
Samsung The Samsung Group (or simply Samsung) ( ko, 삼성 ) is a South Korean multinational manufacturing conglomerate headquartered in Samsung Town, Seoul, South Korea. It comprises numerous affiliated businesses, most of them united under the ...
, IBM,
Intel Intel Corporation is an American multinational corporation and technology company headquartered in Santa Clara, California. It is the world's largest semiconductor chip manufacturer by revenue, and is one of the developers of the x86 seri ...
, Fujitsu,
TSMC Taiwan Semiconductor Manufacturing Company Limited (TSMC; also called Taiwan Semiconductor) is a Taiwanese multinational semiconductor contract manufacturing and design company. It is the world's most valuable semiconductor company, the world' ...
, Elpida,
AMD Advanced Micro Devices, Inc. (AMD) is an American multinational semiconductor company based in Santa Clara, California, that develops computer processors and related technologies for business and consumer markets. While it initially manufactur ...
,
Infineon Infineon Technologies AG is a German semiconductor manufacturer founded in 1999, when the semiconductor operations of the former parent company Siemens AG were spun off. Infineon has about 50,280 employees and is one of the ten largest semicond ...
,
Texas Instruments Texas Instruments Incorporated (TI) is an American technology company headquartered in Dallas, Texas, that designs and manufactures semiconductors and various integrated circuits, which it sells to electronics designers and manufacturers globa ...
and Micron Technology. The origin of the 90 nm value is historical, it reflects a trend of 70% scaling every 2–3 years. The naming is formally determined by the International Technology Roadmap for Semiconductors (ITRS). The 193 nm wavelength was introduced by many (but not all) companies for lithography of critical layers mainly during the 90 nm node. Yield issues associated with this transition (due to the use of new
photoresist A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronic industry. ...
s) were reflected in the high costs associated with this transition. Even more significantly, the 300 mm wafer size became mainstream at the 90 nm node. The previous wafer size was 200 mm diameter.


History

A 90nm
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic ta ...
MOSFET was fabricated by Iranian engineer Ghavam Shahidi (later IBM director) with D.A. Antoniadis and H.I. Smith at
MIT The Massachusetts Institute of Technology (MIT) is a private land-grant research university in Cambridge, Massachusetts. Established in 1861, MIT has played a key role in the development of modern technology and science, and is one of the m ...
in 1988. The device was fabricated using X-ray lithography. Toshiba, Sony and Samsung developed a 90nm process during 20012002, before being introduced in 2002 for Toshiba's eDRAM and Samsung's 2 Gb NAND flash memory. IBM demonstrated a 90nm silicon-on-insulator (SOI) CMOS process, with development led by Ghavam Shahidi, in 2002. The same year, Intel demonstrated a 90nm strained-silicon process. Fujitsu commercially introduced its 90nm process in 200365nm CMOS Process Technology
/ref> followed by TSMC in 2004. Gurtej Singh Sandhu of Micron Technology initiated the development of atomic layer deposition high-k films for DRAM memory devices. This helped drive cost-effective implementation of semiconductor memory, starting with 90nm
node In general, a node is a localized swelling (a "knot") or a point of intersection (a vertex). Node may refer to: In mathematics * Vertex (graph theory), a vertex in a mathematical graph *Vertex (geometry), a point where two or more curves, lines ...
DRAM.


Example: Elpida 90 nm DDR2 SDRAM process

Elpida Memory's 90 nm DDR2 SDRAM process. * Use of 300 mm wafer size * Use of KrF (248 nm) lithography with
optical proximity correction Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The need for OPC is seen mainly in the making of semiconductor devices and is due to ...
* 512 Mbit * 1.8 V operation * Derivative of earlier 110 nm and 100 nm processes


Processors using 90 nm process technology

* Sony/Toshiba EE+ GS ( PlayStation 2) - 2003 * Sony/Toshiba/IBM Cell Processor - 2005 * IBM PowerPC G5 970FX - 2004 * IBM PowerPC G5 970MP - 2005 * IBM PowerPC G5 970GX - 2005 * IBM "Waternoose" Xbox 360 Processor - 2005 * Intel
Pentium 4 Pentium 4 is a series of single-core CPUs for desktops, laptops and entry-level servers manufactured by Intel. The processors were shipped from November 20, 2000 until August 8, 2008. The production of Netburst processors was active from 200 ...
Prescott - 2004-02 * Intel
Celeron Celeron is Intel's brand name for low-end IA-32 and x86-64 computer microprocessor models targeted at low-cost personal computers. Celeron processors are compatible with IA-32 software. They typically offer less performance per clock speed com ...
D Prescott-256 - 2004-05 * Intel Pentium M Dothan - 2004-05 * Intel
Celeron Celeron is Intel's brand name for low-end IA-32 and x86-64 computer microprocessor models targeted at low-cost personal computers. Celeron processors are compatible with IA-32 software. They typically offer less performance per clock speed com ...
M Dothan-1024 - 2004-08 * Intel
Xeon Xeon ( ) is a brand of x86 microprocessors designed, manufactured, and marketed by Intel, targeted at the non-consumer workstation, server, and embedded system markets. It was introduced in June 1998. Xeon processors are based on the same a ...
Nocona, Irwindale, Cranford, Potomac, Paxville - 2004-06 * Intel Pentium D Smithfield - 2005-05 * AMD Athlon 64 Winchester, Venice, San Diego, Orleans - 2004-10 * AMD Athlon 64 X2 Manchester, Toledo, Windsor - 2005-05 * AMD Sempron Palermo and Manila - 2004-08 * AMD Turion 64 Lancaster and Richmond - 2005-03 *
NVIDIA Nvidia CorporationOfficially written as NVIDIA and stylized in its logo as VIDIA with the lowercase "n" the same height as the uppercase "VIDIA"; formerly stylized as VIDIA with a large italicized lowercase "n" on products from the mid 1990s to ...
GeForce GeForce is a brand of graphics processing units (GPUs) designed by Nvidia. As of the GeForce 40 series, there have been eighteen iterations of the design. The first GeForce products were discrete GPUs designed for add-on graphics boards, inte ...
8800 GTS (G80) - 2006 * AMD Turion 64 X2 Taylor and Trinidad - 2006-05 * AMD
Opteron Opteron is AMD's x86 former server and workstation processor line, and was the first processor which supported the AMD64 instruction set architecture (known generically as x86-64 or AMD64). It was released on April 22, 2003, with the ''Sledg ...
Venus, Troy, and Athens - 2005-08 * AMD Dual-core
Opteron Opteron is AMD's x86 former server and workstation processor line, and was the first processor which supported the AMD64 instruction set architecture (known generically as x86-64 or AMD64). It was released on April 22, 2003, with the ''Sledg ...
Denmark, Italy, Egypt, Santa Ana, and Santa Rosa * VIA C7 - 2005-05 * Loongson (Godson) STLS2E02 - 2007-04 * Loongson (Godson) 2F STLS2F02 - 2008-07 * MCST-4R - 2010-12 * Elbrus-2S+ - 2011-11


See also

* Photolithography


References


External links


PC World ReviewReview
ITworld
AMDFujitsu
2004 introductions *00090 American inventions Iranian inventions {{nano-tech-stub