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A surface acoustic wave (SAW) is an
acoustic wave Acoustic waves are a type of energy propagation through a medium by means of adiabatic loading and unloading. Important quantities for describing acoustic waves are acoustic pressure, particle velocity, particle displacement and acoustic intensi ...
traveling along the surface of a material exhibiting elasticity, with an
amplitude The amplitude of a periodic variable is a measure of its change in a single period (such as time or spatial period). The amplitude of a non-periodic signal is its magnitude compared with a reference value. There are various definitions of am ...
that typically decays exponentially with depth into the material, such that they are confined to a depth of about one wavelength.


Discovery

SAWs were first explained in 1885 by
Lord Rayleigh John William Strutt, 3rd Baron Rayleigh, (; 12 November 1842 – 30 June 1919) was an English mathematician and physicist who made extensive contributions to science. He spent all of his academic career at the University of Cambridge. A ...
, who described the surface acoustic mode of propagation and predicted its properties in his classic paper. Named after their discoverer, Rayleigh waves have a
longitudinal Longitudinal is a geometric term of location which may refer to: * Longitude ** Line of longitude, also called a meridian * Longitudinal engine, an internal combustion engine in which the crankshaft is oriented along the long axis of the vehicle, ...
and a vertical shear component that can couple with any media like additional layers in contact with the surface. This coupling strongly affects the amplitude and velocity of the wave, allowing SAW sensors to directly sense mass and mechanical properties. The term 'Rayleigh waves' is often used synonymously with 'SAWs', although strictly speaking there are multiple types of surface acoustic waves, such as
Love wave In elastodynamics, Love waves, named after Augustus Edward Hough Love, are horizontally polarized surface waves. The Love wave is a result of the interference of many shear waves ( S-waves) guided by an elastic layer, which is ''welded'' to ...
s, which are polarised in the plane of the surface, rather than longitudinal and vertical. SAWs such as Love and Rayleigh waves tend to propagate for much longer than bulk waves, as they only have to travel in two dimensions, rather than in three. Furthermore, in general they have a higher velocity than their bulk counterparts.


SAW devices

Surface acoustic wave devices provide wide-range of applications with the use of electronic system, including delay lines, filters, correlators and
DC to DC converter A DC-to-DC converter is an electronic circuit or electromechanical device that converts a source of direct current (DC) from one voltage level to another. It is a type of electric power converter. Power levels range from very low (small batteries) ...
s. The possibilities of these SAW device could provide potential field in radar system, communication systems.


Application in electronic components

This kind of
wave In physics, mathematics, and related fields, a wave is a propagating dynamic disturbance (change from equilibrium) of one or more quantities. Waves can be periodic, in which case those quantities oscillate repeatedly about an equilibrium (re ...
is commonly used in devices called ''SAW devices'' in electronic circuits. SAW devices are used as
filters Filter, filtering or filters may refer to: Science and technology Computing * Filter (higher-order function), in functional programming * Filter (software), a computer program to process a data stream * Filter (video), a software component that ...
,
oscillator Oscillation is the repetitive or periodic variation, typically in time, of some measure about a central value (often a point of equilibrium) or between two or more different states. Familiar examples of oscillation include a swinging pendulum ...
s and
transformer A transformer is a passive component that transfers electrical energy from one electrical circuit to another circuit, or multiple circuits. A varying current in any coil of the transformer produces a varying magnetic flux in the transformer' ...
s, devices that are based on the transduction of acoustic waves. The transduction from electric energy to mechanical energy (in the form of SAWs) is accomplished by the use of
piezoelectric Piezoelectricity (, ) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word '' ...
materials. Electronic devices employing SAWs normally use one or more interdigital transducers (IDTs) to convert acoustic waves to electrical signals and vice versa by exploiting the piezoelectric effect of certain materials, like
quartz Quartz is a hard, crystalline mineral composed of silica ( silicon dioxide). The atoms are linked in a continuous framework of SiO4 silicon-oxygen tetrahedra, with each oxygen being shared between two tetrahedra, giving an overall chemical f ...
, lithium niobate, lithium tantalate, lanthanum gallium silicate, etc. These devices are fabricated by substrate cleaning/treatments like polishing, metallisation,
photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protec ...
, and passivation/protection (dielectric) layer manufacturing. These are typical process steps used in manufacturing of semiconductor like silicon
integrated circuits An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of tin ...
. All parts of the device (substrate, its surface, metallisation material type, thickness of metallisation, its edges formed by photolithography, layers - like passivation coating the metallisation) have effect on the performance of the SAW devices because propagation of Rayleigh waves is highly dependent on the substrate material surface, its quality and all layers in contact with the substrate. For example in SAW filters the sampling frequency is dependent on the width of the IDT fingers, the power handling capability is related to the thickness and materials of the IDT fingers, and the temperature stability depends not only of the temperature behavior of the substrate but also on the metals selected for the IDT electrodes and the possible dielectric layers coating the substrate and the electrodes. SAW filters are now used in mobile telephones, and provide technical advantages in performance, cost, and size over other filter technologies such as quartz crystals (based on bulk waves), LC filters, and waveguide filters specifically at frequencies below 1.5-2.5 GHz depending on the RF power needed to be filtered. Complementing technology to SAW for frequencies above 1.5-2.5 GHz is based on
thin-film bulk acoustic resonator A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medi ...
s (TFBAR, or FBAR). Much research has been done in the last 20 years in the area of surface acoustic wave sensors. Sensor applications include all areas of sensing (such as chemical, optical, thermal,
pressure Pressure (symbol: ''p'' or ''P'') is the force applied perpendicular to the surface of an object per unit area over which that force is distributed. Gauge pressure (also spelled ''gage'' pressure)The preferred spelling varies by country a ...
,
acceleration In mechanics, acceleration is the rate of change of the velocity of an object with respect to time. Accelerations are vector quantities (in that they have magnitude and direction). The orientation of an object's acceleration is given by ...
,
torque In physics and mechanics, torque is the rotational equivalent of linear force. It is also referred to as the moment of force (also abbreviated to moment). It represents the capability of a force to produce change in the rotational motion of th ...
and biological). SAW sensors have seen relatively modest commercial success to date, but are commonly commercially available for some applications such as
touchscreen A touchscreen or touch screen is the assembly of both an input ('touch panel') and output ('display') device. The touch panel is normally layered on the top of an electronic visual display of an information processing system. The display is ofte ...
displays.


SAW device applications in radio and television

SAW resonators are used in many of the same applications in which
quartz crystals Quartz is a hard, crystalline mineral composed of silica (silicon dioxide). The atoms are linked in a continuous framework of SiO4 silicon-oxygen tetrahedra, with each oxygen being shared between two tetrahedra, giving an overall chemical form ...
are used, because they can operate at higher frequency. They are often used in radio transmitters where tunability is not required. They are often used in applications such as
garage door opener A garage door opener is a motorized device that opens and closes a garage door controlled by switches on the garage wall. Most also include a handheld radio remote control carried by the owner, which can be used to open and close the door from a ...
remote controls, short range radio frequency links for computer peripherals, and other devices where channelization is not required. Where a radio link might use several channels, quartz crystal oscillators are more commonly used to drive a phase locked loop. Since the resonant frequency of a SAW device is set by the mechanical properties of the crystal, it does not drift as much as a simple LC oscillator, where conditions such as capacitor performance and battery voltage will vary substantially with temperature and age. SAW filters are also often used in radio receivers, as they can have precisely determined and narrow passbands. This is helpful in applications where a single antenna must be shared between a transmitter and a receiver operating at closely spaced frequencies. SAW filters are also frequently used in
television Television, sometimes shortened to TV, is a telecommunication medium for transmitting moving images and sound. The term can refer to a television set, or the medium of television transmission. Television is a mass medium for advertising, ...
receivers, for extracting
subcarriers A subcarrier is a sideband of a radio frequency carrier wave, which is modulated to send additional information. Examples include the provision of colour in a black and white television system or the provision of stereo in a monophonic radio broa ...
from the signal; until the analog switchoff, the extraction of
digital audio Digital audio is a representation of sound recorded in, or converted into, digital form. In digital audio, the sound wave of the audio signal is typically encoded as numerical samples in a continuous sequence. For example, in CD audio, samp ...
subcarriers from the
intermediate frequency In communications and electronic engineering, an intermediate frequency (IF) is a frequency to which a carrier wave is shifted as an intermediate step in transmission or reception. The intermediate frequency is created by mixing the carrier sig ...
strip of a television receiver or video recorder was one of the main markets for SAW filters. Early pioneer Jeffery Collins incorporated surface acoustic wave devices in a Skynet receiver he developed in the 1970s. It synchronised signals faster than existing technology. They are also often used in digital receivers, and are well suited to superhet applications. This is because the intermediate frequency signal is always at a fixed frequency after the local oscillator has been mixed with the received signal, and so a filter with a fixed frequency and high Q provides excellent removal of unwanted or interference signals. In these applications, SAW filters are almost always used with a phase locked loop synthesized local oscillator, or a varicap driven oscillator.


SAW in geophysics

In
seismology Seismology (; from Ancient Greek σεισμός (''seismós'') meaning "earthquake" and -λογία (''-logía'') meaning "study of") is the scientific study of earthquakes and the propagation of elastic waves through the Earth or through other ...
surface acoustic waves could become the most destructive type of
seismic wave A seismic wave is a wave of acoustic energy that travels through the Earth. It can result from an earthquake, volcanic eruption, magma movement, a large landslide, and a large man-made explosion that produces low-frequency acoustic ener ...
produced by
earthquake An earthquake (also known as a quake, tremor or temblor) is the shaking of the surface of the Earth resulting from a sudden release of energy in the Earth's lithosphere that creates seismic waves. Earthquakes can range in intensity, fr ...
s, which propagate in more complex media, such as ocean bottom, rocks, etc. so that it need to be noticed and monitored by people to protect living environment.


SAW in quantum acoustics

SAWs play a key role in the field of quantum acoustics (QA) where, in contrast to quantum optics (QO) which studies the interaction between matter and light, the interaction between quantum systems (
phonon In physics, a phonon is a collective excitation in a periodic, elastic arrangement of atoms or molecules in condensed matter, specifically in solids and some liquids. A type of quasiparticle, a phonon is an excited state in the quantum mechani ...
s, (quasi-)particles and artificial qubits) and acoustic waves is analysed. The propagation speed of the respective waves of QA is five orders of magnitude slower than that of QO. As a result, QA offers a different perspective of the quantum regime in terms of wavelengths which QO has not covered.Per Delsing et al. 2019 J. Phys. D: Appl. Phys. 52 353001 One example of these additions is the quantum optical investigation of
qubit In quantum computing, a qubit () or quantum bit is a basic unit of quantum information—the quantum version of the classic binary bit physically realized with a two-state device. A qubit is a two-state (or two-level) quantum-mechanical system, ...
s and
quantum dot Quantum dots (QDs) are semiconductor particles a few nanometres in size, having optical and electronic properties that differ from those of larger particles as a result of quantum mechanics. They are a central topic in nanotechnology. When the ...
s fabricated in such a way as to emulate essential aspects of natural atoms, e.g. energy-level structures and coupling to an
electromagnetic field An electromagnetic field (also EM field or EMF) is a classical (i.e. non-quantum) field produced by (stationary or moving) electric charges. It is the field described by classical electrodynamics (a classical field theory) and is the classical ...
. These artificial atoms are arranged into a circuit dubbed ‘giant atoms’, due to its size reaching 10−4–10−3 m. Quantum optical experiments generally made use of microwave fields for matter-light interaction, but because of the difference of wavelength between the giant atoms and microwave fields, the latter of which has a wavelength ranging between 10−2–10−1 m, SAWs were used instead for their more suitable wavelength (10−6 m). Within the fields of
magnonics Magnonics is an emerging field of modern magnetism, which can be considered a sub-field of modern solid state physics. Magnonics combines the study of waves and magnetism. Its main aim is to investigate the behaviour of spin waves in nano-structure ...
and
spintronics Spintronics (a portmanteau meaning spin transport electronics), also known as spin electronics, is the study of the intrinsic spin of the electron and its associated magnetic moment, in addition to its fundamental electronic charge, in solid- ...
, a resonant coupling between spin waves and surface acoustic waves with equal wave-vector and
frequency Frequency is the number of occurrences of a repeating event per unit of time. It is also occasionally referred to as ''temporal frequency'' for clarity, and is distinct from ''angular frequency''. Frequency is measured in hertz (Hz) which is eq ...
allows for the transfer of energy from one form to another, in either direction. This can for example be useful in the construction of
magnetic field A magnetic field is a vector field that describes the magnetic influence on moving electric charges, electric currents, and magnetic materials. A moving charge in a magnetic field experiences a force perpendicular to its own velocity and to ...
sensors, which are sensitive to both the intensity and direction of external magnetic fields. These sensors, constructed using a structure of
magnetostrictive Magnetostriction (cf. electrostriction) is a property of magnetic materials that causes them to change their shape or dimensions during the process of magnetization. The variation of materials' magnetization due to the applied magnetic field chang ...
and
piezoelectric Piezoelectricity (, ) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word '' ...
layers have the benefit of operating without batteries and wires, as well as having a broad range of operating conditions, such as high temperatures or rotating systems.


Single electron control

Even at the smallest scales of current semiconductor technology, each operation is carried out by huge streams of electrons. Reducing the number of electrons involved in these processes, with the ultimate goal of achieving single electron control is a serious challenge. This is due to the electrons being highly interactive with each other and their surroundings, making it difficult to separate just one from the rest. The use of SAWs can help with achieving this goal. When SAWs are generated on a piezoelectric surface, the strain wave generates an electromagnetic potential. The potential minima can then trap single electrons, allowing them to be individually transported. Although this technique was first thought of as a way to accurately define a standard unit of current, it turned out to be more useful in the field of
quantum information Quantum information is the information of the state of a quantum system. It is the basic entity of study in quantum information theory, and can be manipulated using quantum information processing techniques. Quantum information refers to both ...
. Usually,
qubit In quantum computing, a qubit () or quantum bit is a basic unit of quantum information—the quantum version of the classic binary bit physically realized with a two-state device. A qubit is a two-state (or two-level) quantum-mechanical system, ...
s are stationary, making the transfer of information between them difficult. The single electrons, carried by the SAWs, can be used as so called flying qubits, able to transport information from one place to another. To realise this a single electron source is needed, as well as a receiver between which the electron can be transported. Quantum dots (QD) are typically used for these stationary electron confinements. This potential minimum is sometimes called a SAW QD. The process, as seen in the GIF on the right, is typically as follows. First SAWs are generated with an interdigital transducer with specific dimensions between the electrodes to get the favorable wavelengths. Then from the stationary QD the electron quantum tunnels to the potential minimum, or SAW QD. The SAWs transfer some kinetic energy to the electron, driving it forward. It is then carried through a one dimensional channel on a surface of piezoelectric semiconductor material like
GaAs Gallium arsenide (GaAs) is a III-V direct band gap semiconductor with a zinc blende crystal structure. Gallium arsenide is used in the manufacture of devices such as microwave frequency integrated circuits, monolithic microwave integrat ...
. Finally, the electron tunnels out of the SAW QD and into the receiver QD, after which the transfer is complete. This process can also be repeated in both directions.


SAW and 2D materials

As acoustic vibrations can interact with the moving charges in a
piezoelectric Piezoelectricity (, ) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word '' ...
semiconductor through the strain-induced piezoelectric field in bulk materials, this acoustoelectric (AE) coupling is also important in 2D materials, such as
graphene Graphene () is an allotrope of carbon consisting of a Single-layer materials, single layer of atoms arranged in a hexagonal lattice nanostructure.
. In these 2D materials the two-dimensional electron gas has
band gap In solid-state physics, a band gap, also called an energy gap, is an energy range in a solid where no electronic states can exist. In graphs of the electronic band structure of solids, the band gap generally refers to the energy difference ( ...
energies generally much higher than the energy of the SAW phonons traveling through the material. Therefore the SAW phonons are typically absorbed via intra-band electronic transitions. In graphene these transitions are the only way, as the linear dispersion relation of its electrons prevents momentum/energy
conservation Conservation is the preservation or efficient use of resources, or the conservation of various quantities under physical laws. Conservation may also refer to: Environment and natural resources * Nature conservation, the protection and manageme ...
when it would absorb a SAW for an inter-band transition. Often the interaction between moving charges and SAWs results in the diminishing of the SAW intensity as it moves through the 2D electron gas, as well as re-normalizing the SAW velocity. The charges take over
kinetic energy In physics, the kinetic energy of an object is the energy that it possesses due to its motion. It is defined as the work needed to accelerate a body of a given mass from rest to its stated velocity. Having gained this energy during its acce ...
from the SAW and lose this energy again through
carrier scattering Defect types include atom vacancies, adatoms, steps, and kinks that occur most frequently at surfaces due to the finite material size causing crystal discontinuity. What all types of defects have in common, whether surface or bulk defects, is that t ...
. Aside from SAW intensity attenuation, there are specific situations in which the wave can be amplified as well. By applying a
voltage Voltage, also known as electric pressure, electric tension, or (electric) potential difference, is the difference in electric potential between two points. In a static electric field, it corresponds to the work needed per unit of charge to ...
over the material, the charge carriers may obtain a higher drift speed than the SAW. Then they pass on a part of their kinetic energy to the SAW, causing it to amplify its intensity and velocity. The converse works as well. If the SAW is moving faster than the carriers, it may transfer kinetic energy to them, and thereby losing some velocity and intensity.


SAW in microfluidics

In recent years, attention has been drawn to using SAWs to drive microfluidic actuation and a variety of other processes. Owing to the mismatch of sound velocities in the SAW substrate and fluid, SAWs can be efficiently transferred into the fluid, creating significant inertial forces and fluid velocities. This mechanism can be exploited to drive fluid actions such as
pump A pump is a device that moves fluids (liquids or gases), or sometimes slurries, by mechanical action, typically converted from electrical energy into hydraulic energy. Pumps can be classified into three major groups according to the method they ...
ing, mixing, and jetting. To drive these processes, there is a change of mode of the wave at the liquid-substrate interface. In the substrate, the SAW wave is a
transverse wave In physics, a transverse wave is a wave whose oscillations are perpendicular to the direction of the wave's advance. This is in contrast to a longitudinal wave which travels in the direction of its oscillations. Water waves are an example o ...
and upon entering the droplet the wave becomes a
longitudinal wave Longitudinal waves are waves in which the vibration of the medium is parallel ("along") to the direction the wave travels and displacement of the medium is in the same (or opposite) direction of the wave propagation. Mechanical longitudinal waves ...
. It is this longitudinal wave that creates the flow of fluid within the microfluidic droplet, allowing mixing to take place. This technique can be used as an alternative to microchannels and microvalves for manipulation of substrates, allowing for an open system. This mechanism has also been used in
droplet-based microfluidics Droplet-based microfluidics manipulate discrete volumes of fluids in immiscible phases with low Reynolds number and laminar flow regimes. Interest in droplet-based microfluidics systems has been growing substantially in past decades. Microdroplet ...
for droplet manipulation. Notably, using SAW as an actuation mechanism, droplets were pushed towards two or more outlets for sorting. Moreover, SAWs were used for droplet size modulation, splitting, trapping, tweezing, and nanofluidic pipetting. Droplet impact on flat and inclined surfaces has been manipulated and controlled using SAW. PDMS (
polydimethylsiloxane Polydimethylsiloxane (PDMS), also known as dimethylpolysiloxane or dimethicone, belongs to a group of polymeric organosilicon compounds that are commonly referred to as silicones. PDMS is the most widely used silicon-based organic polymer, as its ...
) is a material that can be used to create microchannels and microfluidic chips. It has many uses, including in experiments where living cells are to be tested or processed. If living organisms need to be kept alive, it is important to monitor and control their environment, such as heat and pH levels; however, if these elements are not regulated, the cells may die or it may result in unwanted reactions. PDMS has been found to absorb acoustic energy, causing the PDMS to heat up quickly (exceeding 2000 Kelvin/second). The use of SAW as a way to heat these PDMS devices, along with liquids inside microchannels, is now a technique that can be done in a controlled manner with the ability to manipulate the temperature to within 0.1 °C.


SAW in flow measurement

Surface acoustic waves can be used for flow measurement. SAW relies on the propagation of a wave front, which appears similar to seismic activities. The waves are generated at the excitation centre and spread out along the surface of a solid material. An electric pulse induces them to generate SAWs that propagate like the waves of an
earthquake An earthquake (also known as a quake, tremor or temblor) is the shaking of the surface of the Earth resulting from a sudden release of energy in the Earth's lithosphere that creates seismic waves. Earthquakes can range in intensity, fr ...
. Interdigital
transducer A transducer is a device that converts energy from one form to another. Usually a transducer converts a signal in one form of energy to a signal in another. Transducers are often employed at the boundaries of automation, measurement, and con ...
acts as sender and as receiver. When one is in sender mode, the two most distant ones act as receivers. The SAWs travel along the surface of the measuring tube, but a portion will couple out to the liquid. The decoupling angle depends on the liquid respectively the propagation velocity of the wave which is specific to the liquid. On the other side of the measuring tube, portions of the wave will couple into the tube and continue their way along its surface to the next interdigital transducer. Another portion will be coupled out again and travels back to the other side of the measuring tube where the effect repeats itself and the transducer on this side detects the wave. That means excitation of any one transducer here will lead to a sequence of input signals on two other transducers in the distance. Two of the transducers send their signals in the direction of flow, two in the other direction.Product from Bürkert Fluid Control Systems http://www.processindustryforum.com/article/patented-flow-meter-saw-technology-accurate-flow-measurement-hygienic-applications


See also

*
Linear elasticity Linear elasticity is a mathematical model of how solid objects deform and become internally stressed due to prescribed loading conditions. It is a simplification of the more general nonlinear theory of elasticity and a branch of continuum mec ...
*
Love wave In elastodynamics, Love waves, named after Augustus Edward Hough Love, are horizontally polarized surface waves. The Love wave is a result of the interference of many shear waves ( S-waves) guided by an elastic layer, which is ''welded'' to ...
*
Phonon In physics, a phonon is a collective excitation in a periodic, elastic arrangement of atoms or molecules in condensed matter, specifically in solids and some liquids. A type of quasiparticle, a phonon is an excited state in the quantum mechani ...
*
Picosecond ultrasonics Picosecond ultrasonics is a type of ultrasonics that uses ultra-high frequency ultrasound generated by ultrashort light pulses. It is a non-destructive technique in which picosecond acoustic pulses penetrate into thin films or nanostructures to r ...
* Rayleigh wave *
Ultrasound Ultrasound is sound waves with frequencies higher than the upper audible limit of human hearing. Ultrasound is not different from "normal" (audible) sound in its physical properties, except that humans cannot hear it. This limit varies ...


References


External links


History of SAW Devices

SAW Sensor


{{DEFAULTSORT:Surface Acoustic Wave Surface waves Microtechnology