In
semiconductor device fabrication, channel-stopper or channel-stop is an area in semiconductor devices produced by
implantation or
diffusion
Diffusion is the net movement of anything (for example, atoms, ions, molecules, energy) generally from a region of higher concentration to a region of lower concentration. Diffusion is driven by a gradient in Gibbs free energy or chemical p ...
of
ion
An ion () is an atom or molecule with a net electrical charge.
The charge of an electron is considered to be negative by convention and this charge is equal and opposite to the charge of a proton, which is considered to be positive by conv ...
s, by growing or patterning the
silicon oxide Silicon oxide may refer to either of the following:
*Silicon dioxide or quartz, SiO2, very well characterized
*Silicon monoxide
Silicon monoxide is the chemical compound with the formula SiO where silicon is present in the oxidation state +2. In ...
, or other isolation methods in semiconductor material with the primary function to limit the spread of the
channel area or to prevent the formation of
parasitic channels (
inversion layers).
[" Smart Power ICs", by Bruno Murari, Franco Bertotti, Giovanni A. Vignola, Antonio Andreini, 2002, , ]
pp. 47, 47
/ref>
References
{{reflist
Semiconductor device fabrication