A vacuum flange is a

flange A flange is a protruded ridge, lip or rim (wheel), rim, either external or internal, that serves to increase shear strength, strength (as the flange of an iron beam (structure), beam such as an I-beam or a T-beam); for easy attachment/transfer of ...

at the end of a tube used to connect

vacuum chamber A vacuum chamber is a rigid enclosure from which air and other gases are removed by a vacuum pump. This results in a low-pressure environment within the chamber, commonly referred to as a vacuum. A vacuum environment allows researchers to con ...

s, tubing and

vacuum pump A vacuum pump is a device that draws gas molecules from a sealed volume in order to leave behind a partial vacuum. The job of a vacuum pump is to generate a relative vacuum within a capacity. The first vacuum pump was invented in 1650 by Otto ...

s to each other. Vacuum flanges are used for scientific and industrial applications to allow various pieces of equipment to interact via physical connections and for vacuum maintenance, monitoring, and manipulation from outside a vacuum's chamber. Several flange standards exist with differences in ultimate attainable

pressure Pressure (symbol: ''p'' or ''P'') is the force applied perpendicular to the surface of an object per unit area over which that force is distributed. Gauge pressure (also spelled ''gage'' pressure)The preferred spelling varies by country a ...

, size, and ease of attachment.

Vacuum flange types

Several vacuum flange standards exist, and the same flange types are called by different names by different manufacturers and

standards organization A standards organization, standards body, standards developing organization (SDO), or standards setting organization (SSO) is an organization whose primary function is developing, coordinating, promulgating, revising, amending, reissuing, interpr ...

KF/QF

The ISO standard quick release flange is known by the names Quick Flange (QF) or Kleinflansch (KF, German which translates to "Small flange" in English). The KF designation has been adopted by ISO,

DIN DIN or Din or din may refer to: People and language * Din (name), people with the name * Dīn, an Arabic word with three general senses: judgment, custom, and religion from which the name originates * Dinka language (ISO 639 code: din), spoken by ...

, and Pneurop. KF flanges are made with a

chamfer A chamfer or is a transitional edge between two faces of an object. Sometimes defined as a form of bevel, it is often created at a 45° angle between two adjoining right-angled faces. Chamfers are frequently used in machining, carpentry, ...

ed back surface that are attached with a circular clamp and an

elastomer An elastomer is a polymer with viscoelasticity (i.e. both viscosity and Elasticity (physics), elasticity) and with weak intermolecular forces, generally low Young's modulus and high Deformation (mechanics), failure strain compared with other mate ...

o-ring An O-ring, also known as a packing or a toric joint, is a mechanical gasket in the shape of a torus; it is a loop of elastomer with a round cross-section, designed to be seated in a groove and compressed during assembly between two or more par ...

(AS568 specification) that is mounted in a metal centering ring. Standard sizes are indicated by the nominal inner diameter in millimeters for flanges 10 through 50 mm in diameter. Sizes 10, 20 and 32 are less common sizes (see Renard numbers). Some sizes share their flange dimensions with their respective larger neighbor and use the same clamp size. This means a DN10KF can mate to a DN16KF by using an adaptive centering ring. The same applies for DN20KF to DN25KF and DN32KF to DN40KF.

ISO

The ISO large flange standard is known as LF, LFB, MF or sometimes just ISO flange. As in KF-flanges, the flanges are joined by a centering ring and an elastomeric o-ring. An extra spring-loaded circular clamp is often used around the large-diameter o-rings to prevent them from rolling off from the centering ring during mounting. The ISO large flanges come in two varieties. The ISO-K (or ISO LF) flanges are joined with double-claw clamps, which clamp to a circular groove on the tubing side of the flange. The ISO-F (or ISO LFB) flanges have holes for attaching the two flanges with bolts. Two tubes with ISO-K and ISO-F flanges can be joined together by clamping the ISO-K side with single-claw clamps, which are then bolted to the holes on the ISO-F side. ISO large flanges are available in sizes from 63 to 500 mm nominal tube diameter:

CF (Conflat)

CF (ConFlat) flanges use an oxygen-free high thermal conductivity copper gasket and knife-edge flange to achieve an ultrahigh vacuum seal. The term "ConFlat" is a registered trademark of Varian, Inc., so "CF" is commonly used by other flange manufacturers. Each face of the two mating CF flanges has a knife edge, which cuts into the softer metal gasket, providing an extremely leak-tight, metal-to-metal seal. Deformation of the metal gasket fills small defects in the flange, allowing Conflat flanges operate down to 10⁻¹³

Torr The torr (symbol: Torr) is a unit of pressure based on an absolute scale, defined as exactly of a standard atmosphere (). Thus one torr is exactly (≈ ). Historically, one torr was intended to be the same as one " millimeter of merc ...

(10⁻¹¹ Pa) pressure. The knife edge is recessed in a groove in each flange. In addition to protecting the knife edge, the groove helps hold the gasket in place, which aligns the two flanges and also reduces gasket expansion during bake-out. For stainless-steel conflat flanges, baking temperatures of 450 °C can be achieved; the temperature is limited by the choice of gasket material. CF flanges are sexless and interchangeable. In North America, flange sizes are given by flange outer diameter in inches, while in Europe and Asia, sizes are given by tube inner diameter in millimeters. Despite the different naming conventions, the actual flanges are the same. ConFlat gaskets were originally invented by William Wheeler and other engineers at Varian in an attempt to build a flange that would not leak after baking.

Wheeler

A Wheeler flange is a large wire-seal flange often used on large vacuum chambers.

American Standards Association (ASA)

A flange standard popularized in the United States is codified by the

American National Standards Institute The American National Standards Institute (ANSI ) is a private non-profit organization that oversees the development of voluntary consensus standards for products, services, processes, systems, and personnel in the United States. The orga ...

(ANSI), and is also sometimes named after the organization's previous name, the

American Standards Association The American National Standards Institute (ANSI ) is a private non-profit organization that oversees the development of voluntary consensus standards for products, services, processes, systems, and personnel in the United States. The organ ...

(ASA). These flanges are elastomeric o-ring seal and can be used for both vacuum and pressure applications. Flange sizes are indicated by tube nominal inner diameter (ANSI naming convention) or by flange outer diameter in inches (ASA naming convention).

Vacuum gaskets

To achieve a vacuum seal, a

gasket Some seals and gaskets A gasket is a mechanical seal which fills the space between two or more mating surfaces, generally to prevent leakage from or into the joined objects while under compression. It is a deformable material that is used to ...

is required. An elastomeric

gasket can be made of Buna rubber, viton fluoropolymer,

silicone rubber Silicone rubber is an elastomer (rubber-like material) composed of silicone—itself a polymer—containing silicon together with carbon, hydrogen, and oxygen. Silicone rubbers are widely used in industry, and there are multiple formulation ...

teflon Polytetrafluoroethylene (PTFE) is a synthetic fluoropolymer of tetrafluoroethylene that has numerous applications. It is one of the best-known and widely applied PFAS. The commonly known brand name of PTFE-based composition is Teflon by Chemo ...

. O-rings can be placed in a groove or may be used in combination with a centering ring or as a "captured" o-ring that is held in place by separate metal rings. Metal gaskets are used in ultra-high vacuum systems where the

outgassing Outgassing (sometimes called offgassing, particularly when in reference to indoor air quality) is the release of a gas that was dissolved, trapped, frozen, or absorbed in some material. Outgassing can include sublimation and evaporation (which ...

of the elastomer could be a significant gas load. A copper ring gasket is used with conflat flanges. Metal wire gaskets made of copper,

gold Gold is a chemical element with the symbol Au (from la, aurum) and atomic number 79. This makes it one of the higher atomic number elements that occur naturally. It is a bright, slightly orange-yellow, dense, soft, malleable, and ductile ...

indium Indium is a chemical element with the symbol In and atomic number 49. Indium is the softest metal that is not an alkali metal. It is a silvery-white metal that resembles tin in appearance. It is a post-transition metal that makes up 0.21 parts ...

can be used.

Vacuum feedthrough

A vacuum feedthrough is a flange that contains a vacuum-tight electrical, physical or mechanical connection to the vacuum chamber. An electrical feedthrough allows voltages to be applied to components under vacuum, for example a

filament The word filament, which is descended from Latin ''filum'' meaning " thread", is used in English for a variety of thread-like structures, including: Astronomy * Galaxy filament, the largest known cosmic structures in the universe * Solar filament ...

or heater. An example of a physical feedthrough is a vacuum-tight connection for cooling water. A mechanical feedthrough is used for

rotation Rotation, or spin, is the circular movement of an object around a '' central axis''. A two-dimensional rotating object has only one possible central axis and can rotate in either a clockwise or counterclockwise direction. A three-dimensional ...

and

translation Translation is the communication of the meaning of a source-language text by means of an equivalent target-language text. The English language draws a terminological distinction (which does not exist in every language) between ''transla ...

of components under vacuum. A wobble stick is a mechanical feedthrough device that can be used to pick up, move and otherwise manipulate objects in the vacuum chamber.

References

External links

{{Commons category, Vacuum flanges
ISO 1609:1986 Vacuum technology - Flange dimensions
in vacuum-guide.com

Flange A flange is a protruded ridge, lip or rim (wheel), rim, either external or internal, that serves to increase shear strength, strength (as the flange of an iron beam (structure), beam such as an I-beam or a T-beam); for easy attachment/transfer of ...

Plumbing