Roger Thomas Howe (born 1957 in

Sacramento, California Sacramento ( or ; ; ) is the List of capitals in the United States, capital city of the U.S. state of California and the county seat, seat of Sacramento County, California, Sacramento County. Located at the confluence of the Sacramento Rive ...

) is the William E. Ayer Professor of Electrical Engineering at

Stanford University Leland Stanford Junior University, commonly referred to as Stanford University, is a Private university, private research university in Stanford, California, United States. It was founded in 1885 by railroad magnate Leland Stanford (the eighth ...

. He earned a B.S. degree in physics from

Harvey Mudd College Harvey Mudd College (HMC) is a private liberal arts college in Claremont, California, focused on science and engineering. It is part of the Claremont Colleges, which share adjoining campus grounds and resources. The college enrolled 902 undergra ...

(

Claremont, California Claremont () is a suburban city in eastern Los Angeles County, California, United States, east of Los Angeles. It lies in the Pomona Valley at the foothills of the San Gabriel Mountains. As of the 2010 United States Census, 2010 census it had ...

) and M.S. and Ph.D. degrees in electrical engineering from the

University of California, Berkeley The University of California, Berkeley (UC Berkeley, Berkeley, Cal, or California), is a Public university, public Land-grant university, land-grant research university in Berkeley, California, United States. Founded in 1868 and named after t ...

in 1981 and 1984, respectively. He was a faculty member at Carnegie-Mellon University from 1984 to 1985, at the Massachusetts Institute of Technology from 1985 to 1987, and at UC Berkeley between 1987 and 2005, where he was the Robert S. Pepper Distinguished Professor. He has been a faculty member of the School of Engineering at Stanford since 2005. His research interests are micro and nanoelectromechanical systems (M/NEMS) design and fabrication. He and his Ph.D. advisor, Richard S. Muller at Berkeley, developed polysilicon surface micromachining technology. This process opened the possibilities of micro mechanical elements such as cantilevers, resonators, and gears. It is currently used for the production of billions of inertial sensors , microphones , and timing devices. Polysilicon micromachining technology is still being developed to achieve higher performance sensors . Together with his Ph.D. student
William C. Tang
he co-invented the electrostatic comb drive, which is a key building block for microsensors and actuators. With his former colleague Tsu-Jae King Liu and their students, a low-temperature polycrystalline silicon germanium micromachining technology was developed that could be fabricated after standard CMOS electronics. Since joining Stanford, he has contributed to thermionic energy conversion devices and broad-spectrum electronic biomolecular sensors. He was elected a
IEEE Fellow
in 1996, for "seminal contributions to microfabrication technologies, devices, and micro-electromechanical systems.” He was co-recipient, with Richard S. Muller, of the 199

In 2005, he was elected to the U.S. National Academy of Engineering: "for contributions to the development of microelectromechanical systems in processes, devices and systems." In 2015, he an
Yu-Chong Tai
were co-recipients of th

In 2015, he was also the recipient of th

“for contributions to mentoring and education in the fields of microelectromechanical systems and nanotechnology.” He co-authored the electronics textbook Microelectronics: an Integrated Approach wit
Charles G. Sodini
of MIT. From 2011 - 2015, he was the director of the U.S. National Nanotechnology Infrastructure Network (NNIN) and from 2009 – 2017, he served as the faculty director of th

He co-founded two companies based on research in his group. Silicon Clocks, Inc. was founded in 2004 and was acquired by Silicon Labs, Inc. in 2010
ProbiusDx, Inc.
was founded in December 2015 to commercialize a broad-spectrum electronic biomolecular sensor.https://cap.stanford.edu/profiles/viewCV?facultyId=10500&name=Roger_Howe

References

External links

Roger Howe, Stanford University

Google Scholar, Roger T. Howe
{{DEFAULTSORT:Howe, Roger T. Living people American electrical engineers Stanford University Department of Electrical Engineering faculty UC Berkeley College of Engineering faculty Harvey Mudd College alumni UC Berkeley College of Engineering alumni 1957 births Engineers from California