Microoptomechanical systems (MOMS), also written as micro-optomechanical systems, are a special class of
microelectromechanical systems
Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, ...
(MEMS) which use optical and mechanical, but not electronic components.
See also
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Microoptoelectromechanical systems
Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of dev ...
(MOEMS)
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Nanoelectromechanical systems
Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEM ...
(NEMS)
Microtechnology
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