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Black silicon is a
semiconductor material A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. ...
, a surface modification of
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
with very low
reflectivity The reflectance of the surface of a material is its effectiveness in Reflection (physics), reflecting radiant energy. It is the fraction of incident electromagnetic power that is reflected at the boundary. Reflectance is a component of the respon ...
and correspondingly high absorption of visible (and
infrared Infrared (IR), sometimes called infrared light, is electromagnetic radiation (EMR) with wavelengths longer than those of visible light. It is therefore invisible to the human eye. IR is generally understood to encompass wavelengths from around ...
) light. The modification was discovered in the 1980s as an unwanted side effect of
reactive ion etching Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The p ...
(RIE).Black Silicon
as a functional layer of the micro-system technology
Other methods for forming a similar structure include electrochemical etching, stain etching, metal-assisted chemical etching, and laser treatment (which is developed in
Eric Mazur Eric Mazur (born November 14, 1954) is a physicist and educator at Harvard University, and an entrepreneur in technology start-ups for the educational and technology markets. Mazur's research is in experimental ultrafast optics, condensed matter phy ...
's laboratory at
Harvard University Harvard University is a private Ivy League research university in Cambridge, Massachusetts. Founded in 1636 as Harvard College and named for its first benefactor, the Puritan clergyman John Harvard, it is the oldest institution of higher le ...
). Black silicon has become a major asset to the
solar photovoltaic A photovoltaic system, also PV system or solar power system, is an electric power system designed to supply usable solar power by means of photovoltaics. It consists of an arrangement of several components, including solar panels to absorb and co ...
industry as it enables greater
light Light or visible light is electromagnetic radiation that can be perceived by the human eye. Visible light is usually defined as having wavelengths in the range of 400–700 nanometres (nm), corresponding to frequencies of 750–420 terahe ...
to
electricity Electricity is the set of physical phenomena associated with the presence and motion of matter that has a property of electric charge. Electricity is related to magnetism, both being part of the phenomenon of electromagnetism, as described ...
conversion
efficiency Efficiency is the often measurable ability to avoid wasting materials, energy, efforts, money, and time in doing something or in producing a desired result. In a more general sense, it is the ability to do things well, successfully, and without ...
of standard crystalline silicon solar cells, which significantly reduces their costs.


Properties

Black silicon is a needle-shaped surface structure where needles are made of single-crystal silicon and have a height above 10 µm and diameter less than 1 µm. Its main feature is an increased absorption of incident light—the high reflectivity of the silicon, which is usually 20–30% for quasi-normal incidence, is reduced to about 5%. This is due to the formation of a so-called effective medium by the needles. Within this medium, there is no sharp interface, but a continuous change of the
refractive index In optics, the refractive index (or refraction index) of an optical medium is a dimensionless number that gives the indication of the light bending ability of that medium. The refractive index determines how much the path of light is bent, or ...
that reduces
Fresnel reflection The Fresnel equations (or Fresnel coefficients) describe the reflection and transmission of light (or electromagnetic radiation in general) when incident on an interface between different optical media. They were deduced by Augustin-Jean Fresne ...
. When the depth of the graded layer is roughly equal to the wavelength of light in silicon (about one-quarter the wavelength in vacuum) the reflection is reduced to 5%; deeper grades produce even blacker silicon. For low reflectivity, the nanoscale features producing the index graded layer must be smaller than the wavelength of the incident light to avoid scattering.


Applications

The unusual optical characteristics, combined with the semiconducting properties of silicon make this material interesting for sensor applications. Potential applications include: *
Image sensor An image sensor or imager is a sensor that detects and conveys information used to make an image. It does so by converting the variable attenuation of light waves (as they pass through or reflect off objects) into signals, small bursts of cu ...
s with increased sensitivity *
Thermal imaging camera A thermal imaging camera (colloquially known as a TIC) is a type of the thermographic camera used in firefighting. By rendering infrared radiation as visible light, such cameras allow firefighters to see areas of heat through smoke, darkness, or ...
s *
Photodetector Photodetectors, also called photosensors, are sensors of light or other electromagnetic radiation. There is a wide variety of photodetectors which may be classified by mechanism of detection, such as photoelectric or photochemical effects, or by ...
with high-efficiency through increased absorption. * Mechanical contacts and interfaces * Terahertz applications.Martin Schaefer:
Velcro in miniature – "silicon grass holds together micro-components"
' In: wissenschaft.de. 21 June 2006.
*
Solar cells A solar cell, or photovoltaic cell, is an electronic device that converts the energy of light directly into electricity by the photovoltaic effect, which is a physical and chemical phenomenon.
* Antibacterial surfaces that work by physically rupturing bacteria's cellular membranes. * Surface enhanced Raman spectroscopy * Ammonia Gas Sensors


Production


Reactive-ion etching

In semiconductor technology,
reactive-ion etching Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The p ...
(RIE) is a standard procedure for producing trenches and holes with a depth of up to several hundred micrometres and very high aspect ratios. In Bosch process RIE, this is achieved by repeatedly switching between an etching and passivation. With cryogenic RIE, the low temperature and oxygen gas achieve this sidewall passivation by forming , easily removed from the bottom by directional ions. Both RIE methods can produce black silicon, but the morphology of the resulting structure differs substantially. The switching between etching and passivation of the Bosch process creates undulated sidewalls, which are visible also on the black silicon formed this way. During etching, however, small debris remain on the substrate; they mask the ion beam and produce structures that are not removed and in the following etching and passivation steps result in tall silicon pillars. The process can be set so that a million needles are formed on an area of one square millimeter.


Mazur's method

In 1999, a
Harvard University Harvard University is a private Ivy League research university in Cambridge, Massachusetts. Founded in 1636 as Harvard College and named for its first benefactor, the Puritan clergyman John Harvard, it is the oldest institution of higher le ...
group led by
Eric Mazur Eric Mazur (born November 14, 1954) is a physicist and educator at Harvard University, and an entrepreneur in technology start-ups for the educational and technology markets. Mazur's research is in experimental ultrafast optics, condensed matter phy ...
developed a process in which black silicon was produced by irradiating silicon with
femtosecond A femtosecond is a unit of time in the International System of Units (SI) equal to 10 or of a second; that is, one quadrillionth, or one millionth of one billionth, of a second. For context, a femtosecond is to a second as a second is to about 31. ...
laser pulses. After irradiation in the presence of a gas containing
sulfur hexafluoride Sulfur hexafluoride or sulphur hexafluoride ( British spelling) is an inorganic compound with the formula SF6. It is a colorless, odorless, non-flammable, and non-toxic gas. has an octahedral geometry, consisting of six fluorine atoms attached ...
and other
dopant A dopant, also called a doping agent, is a trace of impurity element that is introduced into a chemical material to alter its original electrical or optical properties. The amount of dopant necessary to cause changes is typically very low. When ...
s, the surface of silicon develops a
self-organized Self-organization, also called spontaneous order in the social sciences, is a process where some form of overall order arises from local interactions between parts of an initially disordered system. The process can be spontaneous when suffi ...
microscopic structure of micrometer-sized cones. The resulting material has many remarkable properties, such as absorption that extends to the
infrared Infrared (IR), sometimes called infrared light, is electromagnetic radiation (EMR) with wavelengths longer than those of visible light. It is therefore invisible to the human eye. IR is generally understood to encompass wavelengths from around ...
range, below the
band gap In solid-state physics, a band gap, also called an energy gap, is an energy range in a solid where no electronic states can exist. In graphs of the electronic band structure of solids, the band gap generally refers to the energy difference (i ...
of silicon, including wavelengths for which ordinary silicon is transparent. sulfur atoms are forced to the silicon surface, creating a structure with a lower
band gap In solid-state physics, a band gap, also called an energy gap, is an energy range in a solid where no electronic states can exist. In graphs of the electronic band structure of solids, the band gap generally refers to the energy difference (i ...
and therefore the ability to absorb longer
wavelength In physics, the wavelength is the spatial period of a periodic wave—the distance over which the wave's shape repeats. It is the distance between consecutive corresponding points of the same phase on the wave, such as two adjacent crests, tro ...
s. Similar surface modification can be achieved in vacuum using the same type of laser and laser processing conditions. In this case, the individual silicon cones lack sharp tips (see image). The reflectivity of such a micro-structured surface is very low, 3–14% in the spectral range 350–1150 nm. Such reduction in reflectivity is contributed by the cone geometry, which increases the light internal reflections between them. Hence, the possibility of light absorption is increased. The gain in absorption achieved by fs laser texturization was superior to that achieved by using an alkaline chemical etch method, which is a standard industrial approach for surface texturing of mono-crystalline silicon wafers in
solar cell A solar cell, or photovoltaic cell, is an electronic device that converts the energy of light directly into electricity by the photovoltaic effect, which is a physical and chemical phenomenon.
manufacturing. Such surface modification is independent of local crystalline orientation. A uniform texturing effect can be achieved across the surface of a multi-crystalline silicon wafer. The very steep angles lower the reflection to near zero and also increase the probability of recombination, keeping it from use in solar cells.


Nanopores

When a mix of
copper nitrate Copper(II) nitrate describes any member of the family of inorganic compounds with the formula Cu( NO3)2(H2O)x. The hydrates are blue solids. Anhydrous copper nitrate forms blue-green crystals and sublimes in a vacuum at 150-200 °C. Common ...
,
phosphorous acid Phosphorous acid (or phosphonic acid (singular)) is the compound described by the formula H3PO3. This acid is diprotic (readily ionizes two protons), not triprotic as might be suggested by this formula. Phosphorous acid is an intermediate in th ...
,
hydrogen fluoride Hydrogen fluoride (fluorane) is an inorganic compound with the chemical formula . This colorless gas or liquid is the principal industrial source of fluorine, often as an aqueous solution called hydrofluoric acid. It is an important feedstock in ...
and water are applied to a silicon wafer, the phosphorous acid reduction reduces the copper ions to
copper nanoparticle A copper nanoparticle is a copper based particle 1 to 100 nm in size.Khan, F.A. ''Biotechnology Fundamentals''; CRC Press; Boca Raton, 2011 Like many other forms of nanoparticles, a copper nanoparticle can be prepared by natural processes or t ...
s. The nanoparticles attract electrons from the wafer's surface, oxidizing it and allowing the hydrogen fluoride to burn inverted pyramid-shaped nanopores into the silicon. The process produced pores as small as 590 nm that let through more than 99% of light.


Chemical Etching

Black silicon can also be produced by chemical etching using a process called Metal-Assisted Chemical Etching (MACE).


Function

When the material is biased by a small electric voltage, absorbed
photons A photon () is an elementary particle that is a quantum of the electromagnetic field, including electromagnetic radiation such as light and radio waves, and the force carrier for the electromagnetic force. Photons are Massless particle, massless ...
are able to excite dozens of
electron The electron ( or ) is a subatomic particle with a negative one elementary electric charge. Electrons belong to the first generation of the lepton particle family, and are generally thought to be elementary particles because they have no kno ...
s. The sensitivity of black silicon detectors is 100–500 times higher than that of untreated silicon (conventional silicon), in both the visible and infrared spectra. A group at the National Renewable Energy Laboratory reported black silicon solar cells with 18.2% efficiency. This black silicon anti-reflective surface was formed by a metal-assisted etch process using nano particles of silver. In May 2015, researchers from
Finland Finland ( fi, Suomi ; sv, Finland ), officially the Republic of Finland (; ), is a Nordic country in Northern Europe. It shares land borders with Sweden to the northwest, Norway to the north, and Russia to the east, with the Gulf of Both ...
's
Aalto University Aalto University ( fi, Aalto-yliopisto; sv, Aalto-universitetet) is a public research university located in Espoo, Finland. It was established in 2010 as a merger of three major Finnish universities: the Helsinki University of Technology, the He ...
, working with researchers from
Universitat Politècnica de Catalunya The Technical University of Catalonia ( ca, Universitat Politècnica de Catalunya, , es, link=no, Universidad Politécnica de Cataluña; UPC), currently referred to as BarcelonaTech, is the largest engineering university in Catalonia, Spai ...
announced they had created black silicon solar cells with 22.1% efficiency by applying a thin passivating film on the nanostructures by
Atomic Layer Deposition Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called precursors (al ...
, and by integrating all metal contacts on the back side of the cell. A team led by Elena Ivanova at
Swinburne University of Technology Swinburne University of Technology (often simply called Swinburne) is a public research university based in Melbourne, Australia. It was founded in 1908 as the Eastern Suburbs Technical College by George Swinburne to serve those without access ...
in
Melbourne Melbourne ( ; Boonwurrung/Woiwurrung: ''Narrm'' or ''Naarm'') is the capital and most populous city of the Australian state of Victoria, and the second-most populous city in both Australia and Oceania. Its name generally refers to a metrop ...
discovered in 2012 that
cicada The cicadas () are a superfamily, the Cicadoidea, of insects in the order Hemiptera (true bugs). They are in the suborder Auchenorrhyncha, along with smaller jumping bugs such as leafhoppers and froghoppers. The superfamily is divided into two ...
wings were potent killers of ''
Pseudomonas aeruginosa ''Pseudomonas aeruginosa'' is a common encapsulated, gram-negative, aerobic– facultatively anaerobic, rod-shaped bacterium that can cause disease in plants and animals, including humans. A species of considerable medical importance, ''P. aeru ...
'', an opportunist germ that also infects humans and is becoming resistant to antibiotics. The effect came from regularly-spaced "nanopillars" on which bacteria were sliced to shreds as they settled on the surface. Both cicada wings and black silicon were put through their paces in a lab, and both were bactericidal. Smooth to human touch, the surfaces destroyed
Gram-negative Gram-negative bacteria are bacteria that do not retain the crystal violet stain used in the Gram staining method of bacterial differentiation. They are characterized by their cell envelopes, which are composed of a thin peptidoglycan cell wall ...
and
Gram-positive bacteria In bacteriology, gram-positive bacteria are bacteria that give a positive result in the Gram stain test, which is traditionally used to quickly classify bacteria into two broad categories according to their type of cell wall. Gram-positive ba ...
, as well as
bacterial spore An endospore is a dormant, tough, and non-reproductive structure produced by some bacteria in the phylum Bacillota. The name "endospore" is suggestive of a spore or seed-like form (''endo'' means 'within'), but it is not a true spore (i.e., ...
s. The three targeted bacterial species were ''P. aeruginosa'', ''
Staphylococcus aureus ''Staphylococcus aureus'' is a Gram-positive spherically shaped bacterium, a member of the Bacillota, and is a usual member of the microbiota of the body, frequently found in the upper respiratory tract and on the skin. It is often positive ...
'' and ''
Bacillus subtilis ''Bacillus subtilis'', known also as the hay bacillus or grass bacillus, is a Gram-positive, catalase-positive bacterium, found in soil and the gastrointestinal tract of ruminants, humans and marine sponges. As a member of the genus '' Bacillus ...
'', a wide-ranging soil germ that is a cousin of
anthrax Anthrax is an infection caused by the bacterium '' Bacillus anthracis''. It can occur in four forms: skin, lungs, intestinal, and injection. Symptom onset occurs between one day and more than two months after the infection is contracted. The s ...
. The killing rate was 450,000 bacteria per square centimetre per minute over the first three hours of exposure or 810 times the minimum dose needed to infect a person with ''S. aureus'', and 77,400 times that of ''P. aeruginosa''. However, it was later proven that the quantification protocol of Ivanova's team was not suitable for these kind of antibacterial surfaces.


See also

*
Quantum efficiency of a solar cell Solar-cell efficiency refers to the portion of energy in the form of sunlight that can be converted via photovoltaics into electricity by the solar cell. The efficiency of the solar cells used in a photovoltaic system, in combination with lat ...
* Solasys * University of Wisconsin-Madison. "'Stealth' material hides hot objects from infrared eyes." ScienceDaily
www.sciencedaily.com/releases/2018/06/180622174752.htm
(accessed 23 June 2018).


References


External links


SiOnyx brings "Black Silicon" into the light


* ttp://sionyx.com/ SiOnyx homepage* ttps://web.archive.org/web/20110720172245/http://www.solasys.eu/file_144922.dat/ Lasers for Photovoltaics – Knowledge Base* {{cite journal , author1=E. Mazur , author2=J. Carey , author3=C. Crouch , author4=R. Younkins , title=Fabrication of micrometer-sized conical field emitters using femtosecond laser-assisted etching of silicon , journal=MRS Spring Meeting , year=2001 , url=http://mazur.harvard.edu/publications/Pub_287.pdf , access-date=6 March 2015 , archive-url=https://web.archive.org/web/20150402111329/http://mazur.harvard.edu/publications/Pub_287.pdf , archive-date=2 April 2015 , url-status=dead
Lasers Improve PV Efficiency

Lasers, Plasmas et Procédés Photoniques – Recherche – Structuration du silicium : Application au Photovoltaïque (in French)
Silicon forms Silicon, black Silicon solar cells Infrared solar cells Thin-film cells