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Refractive Index And Extinction Coefficient Of Thin Film Materials
A. R. Forouhi and I. Bloomer deduced dispersion equations for the Refractive index, refractive index, ''n'', and extinction coefficient, ''k'', which were published in 1986 and 1988. The 1986 publication relates to amorphous materials, while the 1988 publication relates to crystalline. Subsequently, in 1991, their work was included as a chapter in “The Handbook of Optical Constants”. The Forouhi–Bloomer model, Forouhi–Bloomer dispersion equations describe how photons of varying energies interact with thin films. When used with a spectroscopic reflectometry tool, the Forouhi–Bloomer dispersion equations specify ''n'' and ''k'' for amorphous and crystalline materials as a function of photon energy ''E''. Values of ''n'' and ''k'' as a function of photon energy, ''E'', are referred to as the spectra of ''n'' and ''k'', which can also be expressed as functions of wavelength of light, λ, since ''E = hc/λ''. The symbol ''h'' represents Planck’s constant and ''c'', the speed o ...
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Refractive Index
In optics, the refractive index (or refraction index) of an optical medium is a dimensionless number that gives the indication of the light bending ability of that medium. The refractive index determines how much the path of light is bent, or refracted, when entering a material. This is described by Snell's law of refraction, , where ''θ''1 and ''θ''2 are the angle of incidence and angle of refraction, respectively, of a ray crossing the interface between two media with refractive indices ''n''1 and ''n''2. The refractive indices also determine the amount of light that is reflected when reaching the interface, as well as the critical angle for total internal reflection, their intensity ( Fresnel's equations) and Brewster's angle. The refractive index can be seen as the factor by which the speed and the wavelength of the radiation are reduced with respect to their vacuum values: the speed of light in a medium is , and similarly the wavelength in that medium is , where ''� ...
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Ellipsometry
Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry measures the change of polarization upon reflection or transmission and compares it to a model. It can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated. A spectroscopic ellipsometer can be found in most thin film analytical labs. Ellipsometry is also becoming more interesting to researchers in other disciplines such as biology and medicine. These areas pose new challenges to the technique, such as measurements on unstable liquid surfaces and microscopic imaging. Etymology The name "ellipsometry" stems from the fact that elliptical polarization of light is used. The term "sp ...
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Semiconductors
A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. Its conducting properties may be altered in useful ways by introducing impurities (" doping") into the crystal structure. When two differently doped regions exist in the same crystal, a semiconductor junction is created. The behavior of charge carriers, which include electrons, ions, and electron holes, at these junctions is the basis of diodes, transistors, and most modern electronics. Some examples of semiconductors are silicon, germanium, gallium arsenide, and elements near the so-called "metalloid staircase" on the periodic table. After silicon, gallium arsenide is the second-most common semiconductor and is used in laser diodes, solar cells, microwave-frequency integrated circuits, and others. Silicon is a critical element for fabric ...
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Thin Films
A thin film is a layer of material ranging from fractions of a nanometer ( monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering. Advances in thin film deposition techniques during the 20th century have enabled a wide range of technological breakthroughs in areas such as magnetic recording media, electronic semiconductor devices, integrated passive devices, LEDs, optical coatings (such as antireflective coatings), hard coatings on cutting tools, and for both energy generation (e.g. thin-film solar cells) and storage ( thin-film batteries). It is als ...
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Light
Light or visible light is electromagnetic radiation that can be perceived by the human eye. Visible light is usually defined as having wavelengths in the range of 400–700 nanometres (nm), corresponding to frequencies of 750–420 terahertz, between the infrared (with longer wavelengths) and the ultraviolet (with shorter wavelengths). In physics, the term "light" may refer more broadly to electromagnetic radiation of any wavelength, whether visible or not. In this sense, gamma rays, X-rays, microwaves and radio waves are also light. The primary properties of light are intensity, propagation direction, frequency or wavelength spectrum and polarization. Its speed in a vacuum, 299 792 458 metres a second (m/s), is one of the fundamental constants of nature. Like all types of electromagnetic radiation, visible light propagates by massless elementary particles called photons that represents the quanta of electromagnetic field, and can be analyzed as both waves an ...
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Indium Tin Oxide
Indium tin oxide (ITO) is a ternary composition of indium, tin and oxygen in varying proportions. Depending on the oxygen content, it can be described as either a ceramic or an alloy. Indium tin oxide is typically encountered as an oxygen-saturated composition with a formulation of 74% In, 18% Sn, and 8% O by weight. Oxygen-saturated compositions are so typical that unsaturated compositions are termed ''oxygen-deficient ITO''. It is transparent and colorless in thin layers, while in bulk form it is yellowish to gray. In the infrared region of the spectrum it acts as a metal-like mirror. Indium tin oxide is one of the most widely used transparent conducting oxides because of its electrical conductivity and optical transparency, the ease with which it can be deposited as a thin film, and its chemical resistance to moisture. As with all transparent conducting films, a compromise must be made between conductivity and transparency, since increasing the thickness and increasing the concent ...
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Photoresist
A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronic industry. The process begins by coating a substrate with a light-sensitive organic material. A patterned mask is then applied to the surface to block light, so that only unmasked regions of the material will be exposed to light. A solvent, called a developer, is then applied to the surface. In the case of a positive photoresist, the photo-sensitive material is degraded by light and the developer will dissolve away the regions that were exposed to light, leaving behind a coating where the mask was placed. In the case of a negative photoresist, the photosensitive material is strengthened (either polymerized or cross-linked) by light, and the developer will dissolve away only the regions that were not exposed to light, leaving behind a coating in areas ...
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Polarization (waves)
Polarization ( also polarisation) is a property applying to transverse waves that specifies the geometrical orientation of the oscillations. In a transverse wave, the direction of the oscillation is perpendicular to the direction of motion of the wave. A simple example of a polarized transverse wave is vibrations traveling along a taut string ''(see image)''; for example, in a musical instrument like a guitar string. Depending on how the string is plucked, the vibrations can be in a vertical direction, horizontal direction, or at any angle perpendicular to the string. In contrast, in longitudinal waves, such as sound waves in a liquid or gas, the displacement of the particles in the oscillation is always in the direction of propagation, so these waves do not exhibit polarization. Transverse waves that exhibit polarization include electromagnetic waves such as light and radio waves, gravitational waves, and transverse sound waves (shear waves) in solids. An electromagnetic ...
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Rigorous Coupled-wave Analysis
Rigorous coupled-wave analysis (RCWA) is a semi-analytical method in computational electromagnetics that is most typically applied to solve scattering from periodic dielectric structures. It is a Fourier-space method so devices and fields are represented as a sum of spatial harmonics. Floquet's theorem The method is based on Floquet's theorem that the solutions of periodic differential equations can be expanded with Floquet functions (or sometimes referred as Bloch wave, especially in solid-state physics community). A device is divided into layers that are each uniform in the z direction. A staircase approximation is needed for curved devices with properties such as dielectric permittivity graded along the z-direction. The electromagnetic modes in each layer are calculated and analytically propagated through the layers. The overall problem is solved by matching boundary conditions at each of the interfaces between the layers using a technique like scattering matrices. T ...
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Thin Film Analysis Process
Thin may refer to: * a lean body shape. ''(See also: emaciation, underweight)'' * ''Thin'' (film), a 2006 HBO documentary about eating disorders * Paper Thin (other), referring to multiple songs * Thin (web server), a Ruby web-server based on Mongrel * Thin (name) See also * * * Thin client, a computer in a client-server architecture network. * Thin film, a material layer of about 1 μm thickness. * Thin-film deposition, any technique for depositing a thin film of material onto a substrate or onto previously deposited layers * Thin film memory, high-speed variation of core memory developed by Sperry Rand in a government-funded research project * Thin-film optics, the branch of optics that deals with very thin structured layers of different materials * Thin layer chromatography (TLC), a chromatography technique used in chemistry to separate chemical compounds * Thin layers (oceanography), congregations of phytoplankton and zooplankton in the water column * Thin le ...
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Fresnel Equations
The Fresnel equations (or Fresnel coefficients) describe the reflection and transmission of light (or electromagnetic radiation in general) when incident on an interface between different optical media. They were deduced by Augustin-Jean Fresnel () who was the first to understand that light is a transverse wave, even though no one realized that the "vibrations" of the wave were electric and magnetic fields. For the first time, polarization could be understood quantitatively, as Fresnel's equations correctly predicted the differing behaviour of waves of the ''s'' and ''p'' polarizations incident upon a material interface. Overview When light strikes the interface between a medium with refractive index ''n''1 and a second medium with refractive index ''n''2, both reflection and refraction of the light may occur. The Fresnel equations give the ratio of the ''reflected'' wave's electric field to the incident wave's electric field, and the ratio of the ''transmitted'' wave's elec ...
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